### 摘要

This paper proposes a system utilizing a Renishaw XL80 positioning error measuring interferometer and sensitivity analysis design to measure six-degree-of-freedom (6 DOF) geometric errors of a machine tool’s linear guide. Each error is characterized by high independence with significantly reduced crosstalk, and error calculations are extremely fast and accurate. Initially, the real light path was simulated using Zemax. Then, Matlab’s skew ray tracing method was used to perform mathematical modeling and ray matching. Each error’s sensitivity to the sensor was then analyzed, and curve fitting was used to simplify and speed up the mathematical model computations. Finally, Solidworks was used to design the set of system modules, bringing the proposed system closer to a product. This system measured actual 6 DOF geometric errors of a machine tool’s linear guide, and a comparison is made with the Renishaw XL-80 interferometer measurements. The resulting pitch, yaw, horizontal straightness, and vertical straightness error deviation ranges are ±0.5 arcsec, ±3.6 arcsec, ±2.1 µm, and ±2.3 µm, respectively. The maximum repeatability deviations for the measured guide’s pitch, yaw, roll, horizontal straightness, vertical straightness, and positioning errors are 0.4 arcsec, 0.2 arcsec, 4.2 arcsec, 1.5 µm, 0.3 µm, and 3 µm, respectively.

原文 | English |
---|---|

文章編號 | 5 |

期刊 | Sensors (Switzerland) |

卷 | 19 |

發行號 | 1 |

DOIs | |

出版狀態 | Published - 2019 一月 |

### 指紋

### All Science Journal Classification (ASJC) codes

- Analytical Chemistry
- Atomic and Molecular Physics, and Optics
- Biochemistry
- Instrumentation
- Electrical and Electronic Engineering

### 引用此文

*Sensors (Switzerland)*,

*19*(1), [5]. https://doi.org/10.3390/s19010005

}

*Sensors (Switzerland)*, 卷 19, 編號 1, 5. https://doi.org/10.3390/s19010005

**Design of a measurement system for six-degree-of-freedom geometric errors of a linear guide of a machine tool.** / Liu, Chien Sheng; Lai, Jia Jun; Luo, Yong Tai.

研究成果: Article

TY - JOUR

T1 - Design of a measurement system for six-degree-of-freedom geometric errors of a linear guide of a machine tool

AU - Liu, Chien Sheng

AU - Lai, Jia Jun

AU - Luo, Yong Tai

PY - 2019/1

Y1 - 2019/1

N2 - This paper proposes a system utilizing a Renishaw XL80 positioning error measuring interferometer and sensitivity analysis design to measure six-degree-of-freedom (6 DOF) geometric errors of a machine tool’s linear guide. Each error is characterized by high independence with significantly reduced crosstalk, and error calculations are extremely fast and accurate. Initially, the real light path was simulated using Zemax. Then, Matlab’s skew ray tracing method was used to perform mathematical modeling and ray matching. Each error’s sensitivity to the sensor was then analyzed, and curve fitting was used to simplify and speed up the mathematical model computations. Finally, Solidworks was used to design the set of system modules, bringing the proposed system closer to a product. This system measured actual 6 DOF geometric errors of a machine tool’s linear guide, and a comparison is made with the Renishaw XL-80 interferometer measurements. The resulting pitch, yaw, horizontal straightness, and vertical straightness error deviation ranges are ±0.5 arcsec, ±3.6 arcsec, ±2.1 µm, and ±2.3 µm, respectively. The maximum repeatability deviations for the measured guide’s pitch, yaw, roll, horizontal straightness, vertical straightness, and positioning errors are 0.4 arcsec, 0.2 arcsec, 4.2 arcsec, 1.5 µm, 0.3 µm, and 3 µm, respectively.

AB - This paper proposes a system utilizing a Renishaw XL80 positioning error measuring interferometer and sensitivity analysis design to measure six-degree-of-freedom (6 DOF) geometric errors of a machine tool’s linear guide. Each error is characterized by high independence with significantly reduced crosstalk, and error calculations are extremely fast and accurate. Initially, the real light path was simulated using Zemax. Then, Matlab’s skew ray tracing method was used to perform mathematical modeling and ray matching. Each error’s sensitivity to the sensor was then analyzed, and curve fitting was used to simplify and speed up the mathematical model computations. Finally, Solidworks was used to design the set of system modules, bringing the proposed system closer to a product. This system measured actual 6 DOF geometric errors of a machine tool’s linear guide, and a comparison is made with the Renishaw XL-80 interferometer measurements. The resulting pitch, yaw, horizontal straightness, and vertical straightness error deviation ranges are ±0.5 arcsec, ±3.6 arcsec, ±2.1 µm, and ±2.3 µm, respectively. The maximum repeatability deviations for the measured guide’s pitch, yaw, roll, horizontal straightness, vertical straightness, and positioning errors are 0.4 arcsec, 0.2 arcsec, 4.2 arcsec, 1.5 µm, 0.3 µm, and 3 µm, respectively.

UR - http://www.scopus.com/inward/record.url?scp=85058922300&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85058922300&partnerID=8YFLogxK

U2 - 10.3390/s19010005

DO - 10.3390/s19010005

M3 - Article

C2 - 30577462

AN - SCOPUS:85058922300

VL - 19

JO - Sensors

JF - Sensors

SN - 1424-3210

IS - 1

M1 - 5

ER -