Design of a measurement system for six-degree-of-freedom geometric errors of a linear guide of a machine tool

Chien Sheng Liu, Jia Jun Lai, Yong Tai Luo

研究成果: Article

4 引文 (Scopus)

摘要

This paper proposes a system utilizing a Renishaw XL80 positioning error measuring interferometer and sensitivity analysis design to measure six-degree-of-freedom (6 DOF) geometric errors of a machine tool’s linear guide. Each error is characterized by high independence with significantly reduced crosstalk, and error calculations are extremely fast and accurate. Initially, the real light path was simulated using Zemax. Then, Matlab’s skew ray tracing method was used to perform mathematical modeling and ray matching. Each error’s sensitivity to the sensor was then analyzed, and curve fitting was used to simplify and speed up the mathematical model computations. Finally, Solidworks was used to design the set of system modules, bringing the proposed system closer to a product. This system measured actual 6 DOF geometric errors of a machine tool’s linear guide, and a comparison is made with the Renishaw XL-80 interferometer measurements. The resulting pitch, yaw, horizontal straightness, and vertical straightness error deviation ranges are ±0.5 arcsec, ±3.6 arcsec, ±2.1 µm, and ±2.3 µm, respectively. The maximum repeatability deviations for the measured guide’s pitch, yaw, roll, horizontal straightness, vertical straightness, and positioning errors are 0.4 arcsec, 0.2 arcsec, 4.2 arcsec, 1.5 µm, 0.3 µm, and 3 µm, respectively.

原文English
文章編號5
期刊Sensors (Switzerland)
19
發行號1
DOIs
出版狀態Published - 2019 一月

指紋

Yaws
machine tools
Machine tools
degrees of freedom
Theoretical Models
Light
yaw
Interferometers
positioning
interferometers
deviation
curve fitting
Curve fitting
Ray tracing
sensitivity analysis
Crosstalk
crosstalk
ray tracing
Sensitivity analysis
mathematical models

All Science Journal Classification (ASJC) codes

  • Analytical Chemistry
  • Atomic and Molecular Physics, and Optics
  • Biochemistry
  • Instrumentation
  • Electrical and Electronic Engineering

引用此文

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