Design of power control for ultrasonic cleaning systems based on hybrid PID/fuzzy methodology

Te Jen Su, Kun Liang Lo, Chia Lin Chung, Jason Sheng Hong Tsai, Jui Chuan Cheng

研究成果: Article同行評審

摘要

The high-power ultrasonic cleaning system is used in the manufacturing of clean product contaminants. The pulse density modulation (PDM) switching strategy is more efficient for cleaning the rough surface of equipment. This paper proposes a novel pulse density modulation duty cycle stepping (PDMDCS) method that incorporates a proportional–integral–derivative controller and fuzzy logic for the mechanical resonance frequency tracking and PDM duty cycle stepping for ultrasonic cleaning system power control. The experimental results show that based on the same hardware architecture, the proposed PDMDCS method increases the power control range and resolution of power control without adding more hardware that compares to mechanical resonance frequency control method.

原文English
頁(從 - 到)1655-1663
頁數9
期刊Microsystem Technologies
27
發行號4
DOIs
出版狀態Published - 2021 四月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 硬體和架構
  • 電氣與電子工程

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