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Design of thicknesses and refractive indexes measurement system combined with auto-focus system for multilayer transparent samples
Chien Sheng Liu
, Wen Yu Shih, Yi Chi Li, Yu Cheng Tzeng
機械工程學系
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Chemical Compounds
Chemical Transformation
24%
Ellipsometry
41%
Error
28%
Interferometry
51%
Multilayer
68%
Refractive Index
73%
Simulation
24%
Surface
12%
Engineering & Materials Science
Calibration
9%
Ellipsometry
21%
Experiments
4%
Geometrical optics
19%
Image processing
9%
Image sensors
13%
Interferometry
15%
Lasers
9%
Light sources
13%
Mathematical models
17%
Multilayers
73%
Ray tracing
14%
Refractive index
100%
Physics & Astronomy
computer programs
11%
ellipsometry
14%
geometrical optics
16%
image processing
15%
inclination
14%
installing
14%
interferometry
13%
lasers
6%
light sources
12%
mathematical models
25%
optical measurement
15%
prototypes
12%
ray tracing
15%
refractivity
53%
sensors
9%
simulation
5%
theorems
12%
transparence
38%