Detection sensitivity and spatial resolution of reverse-bias pulsed deep-level transient spectroscopy for studying electric field-enhanced carrier emission

G. P. Li, K. L. Wang

研究成果: Article同行評審

13 引文 斯高帕斯(Scopus)

摘要

Reverse-bias pulsed deep-level transient spectroscopy (RDLTS) has recently been used for studies of electric field-enhanced emission from a deep-level defect. The sensitivity, spatial, and temperature resolutions of this technique are investigated and compared with those of DLTS. The electric field strength in a narrow region, where the transient capacitance signal comes from, can be accurately controlled by using RDLTS. The calculated results indicate that there is an optimal operating condition given by a range of emission pulse widths and heights. This operating condition is given for the best compromise of the temperature and spatial resolutions.

原文English
頁(從 - 到)1016-1021
頁數6
期刊Journal of Applied Physics
57
發行號4
DOIs
出版狀態Published - 1985

All Science Journal Classification (ASJC) codes

  • 物理與天文學 (全部)

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