Developing a nanowriter system: Simulation and experimental set-up of a plasmonic-based lens design

C. K. Lee, C. L. Lin, D. Z. Lin, T. D. Cheng, C. K. Chang, L. B. Yu, C. S. Yeh

研究成果: Conference contribution

4 引文 斯高帕斯(Scopus)

摘要

The aim of this article is to introduce a nanowriter system that could lead to a sub-micrometer spot size using a visible light source under ambient conditions. The key component of the system is a focusing optical head, which incorporates a plasmonic-based lens instead of a conventional lens. Based on knowledge of the physical origin of extraordinary transmission and directional beaming, we theorize that the directional beaming phenomenon can be explained simply as a surface plasmon (SP) diffraction along the corrugations as long as the multiple scattering effects are taken into account to modify the dispersion relationship of the surface plasmon. We introduce a Rigorous Coupled Wave Analysis (RCWA) formulation to pursue a precise dispersion relationship needed for the lens design. Comparing the resultant theoretical data between Finite Difference Time Domain (FDTD) simulations and RCWA results, we found good agreement and the many important characteristic parameters needed for an innovative lens design. We also set up a writing-test optomechanical system to examine the photoresist exposure ability of the plasmonic-based lens.

原文English
主出版物標題Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
發行者Trans Tech Publications Ltd
頁面1-6
頁數6
版本PART 1
ISBN(列印)0878499903, 9780878499908
DOIs
出版狀態Published - 2006 一月 1
事件2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan
持續時間: 2005 十一月 282005 十二月 2

出版系列

名字Materials Science Forum
號碼PART 1
505-507
ISSN(列印)0255-5476
ISSN(電子)1662-9752

Other

Other2005 International Conference on Advanced Manufacture, ICAM2005
國家/地區Taiwan
城市Taipei, R.O.C.
期間05-11-2805-12-02

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 凝聚態物理學
  • 材料力學
  • 機械工業

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