Developing a selection scheme for dual virtual-metrology outputs

Wei Ming Wu, Fan Tien Cheng, Deng Lin Zeng, Tung Ho Lin, Jyun Fang Chen

研究成果: Conference contribution

5 引文 斯高帕斯(Scopus)

摘要

This paper proposes a selection scheme (S-scheme) between neural-network (NN) and multiple-regression (MR) outputs of a virtual metrology system (VMS). Both NN and MR are applicable algorithms for implementing VM conjecture models. But a MR algorithm may achieve better accuracy only with a stable process, whereas a NN algorithm may has superior accuracy when equipment property drift or shift occurs. To take advantage of the merits of both MR and NN algorithms, the S-scheme is proposed to enhance virtual-metrology (VM) conjecture accuracy. Two illustrative examples in the CVD process of fifth generation TFT-LCD are used to test and compare the conjecture accuracy among solo NN, solo MR, and S-scheme. One-hidden-layered back-propagation neural network (BPNN-I) is adopted for establishing the NN conjecture model. Test results show that the conjecture accuracy of S-scheme can achieve superior accuracy than solo NN and solo MR algorithms.

原文English
主出版物標題4th IEEE Conference on Automation Science and Engineering, CASE 2008
頁面230-235
頁數6
DOIs
出版狀態Published - 2008 十一月 3
事件4th IEEE Conference on Automation Science and Engineering, CASE 2008 - Washington, DC, United States
持續時間: 2008 八月 232008 八月 26

出版系列

名字4th IEEE Conference on Automation Science and Engineering, CASE 2008

Other

Other4th IEEE Conference on Automation Science and Engineering, CASE 2008
國家/地區United States
城市Washington, DC
期間08-08-2308-08-26

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 電氣與電子工程

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