Developing an automatic virtual metrology system

研究成果: Article同行評審

82 引文 斯高帕斯(Scopus)

摘要

Virtual Metrology (VM) is a method to conjecture manufacturing quality of a process tool based on data sensed from the process tool and without physical metrology operations. VM has now been designated by the International SEMATECH Manufacturing Initiative and International Technology Roadmap for Semiconductors as one of the focus areas for the next-generation factory realization roadmap of the semiconductor industry. This paper defines the VM automation levels, proposes the concept of automatic virtual metrology (AVM), and develops an AVM system for automatic and fab-wide VM deployment. The example of automatic VM model refreshing for chemical vapor deposition (CVD) tools is also illustrated in this paper. The AVM system has been successfully deployed in a fifth-generation thin-film-transistor-liquid-crystal-display (TFT-LCD) factory in Chi Mei Optoelectronics (CMO), Taiwan.

原文English
文章編號6051498
頁(從 - 到)181-188
頁數8
期刊IEEE Transactions on Automation Science and Engineering
9
發行號1
DOIs
出版狀態Published - 2012 1月

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 電氣與電子工程

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