@inproceedings{78b51d8e2ae345dba45ee9acadbc9b68,
title = "Development of a bridge-microcantilever by cmos process for surface stress measurement",
author = "Shih-Ming Yang and Chun Chang and Yin, {Tsung I.}",
year = "2009",
month = dec,
day = "1",
doi = "10.1115/SBC2009-206333",
language = "English",
isbn = "9780791848913",
series = "Proceedings of the ASME Summer Bioengineering Conference 2009, SBC2009",
number = "PART B",
pages = "883--884",
booktitle = "Proceedings of the ASME Summer Bioengineering Conference 2009, SBC2009",
edition = "PART B",
note = "11th ASME Summer Bioengineering Conference, SBC2009 ; Conference date: 17-06-2009 Through 21-06-2009",
}