Development of a flexure hinge-based stack-type 5 DOF coplanar nanometer-scale stage

Wen Yuh Jywe, Yeau-Ren Jeng, Chien Hung Liu, Yun Feng Teng, Hung Shu Wang, Rong Fong Fung

研究成果: Conference contribution

摘要

This paper concentrates on the design and manufacturing process of a flexure hinge-based stack-type 5 DOF coplanar nanometer-scale stage with high accuracy and multiple DOF. This paper uses the features of a flexible structure to develop a coplanar nanometer-scale stage with 5 DOF that allows the increase or decrease of axis action in accordance with various needs. The flexible structure of the coplanar nanometer-scale stage was included two kinds of the cylindrical flexible body and arc flexible body. The coplanar nanometer-scale stage allows for 3-translational and 2-rotational motions and is provided with eight piezoelectric actuators - one on the X-axis, another on the Y-axis, and the others on the Z-axis. The displacement characteristics of the output member of the stage were measured with the built-in capacitive sensors.

原文English
主出版物標題Advances and Trends in Engineering Materials and their Applications - Proceedings of AES-ATEMA 1st International Conference
頁面307-311
頁數5
出版狀態Published - 2007 十二月 1
事件1st International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2007 - Montreal, QC, Canada
持續時間: 2007 八月 62007 八月 10

出版系列

名字AES-ATEMA International Conference Series - Advances and Trends in Engineering Materials and their Applications
ISSN(列印)1924-3642

Conference

Conference1st International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2007
國家/地區Canada
城市Montreal, QC
期間07-08-0607-08-10

All Science Journal Classification (ASJC) codes

  • 材料力學
  • 材料科學(全部)

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