Development of a generic equipment manager for semiconductor manufacturing

Haw Ching Yang, Fan-Tien Cheng, David Huang

研究成果: Conference contribution

12 引文 斯高帕斯(Scopus)

摘要

The purpose of this research is to develop the Generic Equipment Manager (GEMG) which can either operate alone or be integrated with the Manufacturing Execution System (MES). In order to achieve generality and reusability, the governing rules of the GEMG are divided into three independent portions: System/Framework Rules, Business Rules, and Equipment Rules. The System/Framework Rules specify the requirements to become a pluggable component of MES Framework. The Business Rules are company-dependent and are equipment-independent. A Controller Application module, which drive desired Scenarios, is developed to realize the Business Rules. The Equipment Rules are equipment-dependent and are company-independent. These Equipment Rules are achieved by the module of Equipment Driver which compile appropriate Behaviors. Considering reusability, the so-called Generic Equipment Interface (GEI) messages which are fine-grained, company-independent, and equipment-independent are developed to be the communication messages between the Controller Application and Equipment Driver. Therefore, reusability is easily accomplished. Several examples are shown to demonstrate the generality and reusability of the GEMG.

原文English
主出版物標題IEEE Symposium on Emerging Technologies and Factory Automation, ETFA
發行者IEEE
頁面727-732
頁數6
1
出版狀態Published - 1999
事件Proceedings of the 1999 7th IEEE International Conference on Emerging Technologies and Factory Automation (ETFA'99) - Barcelona, Spain
持續時間: 1999 十月 181999 十月 21

Other

OtherProceedings of the 1999 7th IEEE International Conference on Emerging Technologies and Factory Automation (ETFA'99)
城市Barcelona, Spain
期間99-10-1899-10-21

    指紋

All Science Journal Classification (ASJC) codes

  • Engineering(all)

引用此

Yang, H. C., Cheng, F-T., & Huang, D. (1999). Development of a generic equipment manager for semiconductor manufacturing. 於 IEEE Symposium on Emerging Technologies and Factory Automation, ETFA (卷 1, 頁 727-732). IEEE.