In this paper, it presents a useful dual-axial five-degrees-of-freedom measuring system with five degrees of freedom (DoFs) for the simultaneous measurement of five-DoF motion errors of a nano-stage. The system integrates a miniature fibre-coupled laser interferometer with specially designed optical paths and quadrant detectors, capable of measuring five-DoF motion errors. It presents a new precision five-DoF measuring system which has been developed and implemented for the simultaneous measurement of five-DoF motion errors (two linear positions, as well as pitch, roll, and yaw) of a nano-stage. In this paper, the five-DoF laser interferometer was produced by designing the optical path from the one-DoF laser interferometer. The system employs two three-DoF interferometers to detect two position errors and three angular errors of the nano-stage. The experimental set-ups and measuring procedure and a systematic calculated method for the error verification are presented as well. The resolution of measuring the angular errors component is about 0.06′′.
|頁（從 - 到）||443-448|
|期刊||Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture|
|出版狀態||Published - 2009 四月 1|
All Science Journal Classification (ASJC) codes