Development of a novel laser dual-axis five- degrees-of-freedom measuring system

W. Jywe, Yeau-Ren Jeng, C. H. Liu, Y. F. Teng

研究成果: Review article

2 引文 斯高帕斯(Scopus)

摘要

In this paper, it presents a useful dual-axial five-degrees-of-freedom measuring system with five degrees of freedom (DoFs) for the simultaneous measurement of five-DoF motion errors of a nano-stage. The system integrates a miniature fibre-coupled laser interferometer with specially designed optical paths and quadrant detectors, capable of measuring five-DoF motion errors. It presents a new precision five-DoF measuring system which has been developed and implemented for the simultaneous measurement of five-DoF motion errors (two linear positions, as well as pitch, roll, and yaw) of a nano-stage. In this paper, the five-DoF laser interferometer was produced by designing the optical path from the one-DoF laser interferometer. The system employs two three-DoF interferometers to detect two position errors and three angular errors of the nano-stage. The experimental set-ups and measuring procedure and a systematic calculated method for the error verification are presented as well. The resolution of measuring the angular errors component is about 0.06′′.

原文English
頁(從 - 到)443-448
頁數6
期刊Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
223
發行號4
DOIs
出版狀態Published - 2009 四月 1

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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