TY - JOUR
T1 - Development of a novel laser dual-axis five- degrees-of-freedom measuring system
AU - Jywe, W.
AU - Jeng, Y. R.
AU - Liu, C. H.
AU - Teng, Y. F.
PY - 2009/4/1
Y1 - 2009/4/1
N2 - In this paper, it presents a useful dual-axial five-degrees-of-freedom measuring system with five degrees of freedom (DoFs) for the simultaneous measurement of five-DoF motion errors of a nano-stage. The system integrates a miniature fibre-coupled laser interferometer with specially designed optical paths and quadrant detectors, capable of measuring five-DoF motion errors. It presents a new precision five-DoF measuring system which has been developed and implemented for the simultaneous measurement of five-DoF motion errors (two linear positions, as well as pitch, roll, and yaw) of a nano-stage. In this paper, the five-DoF laser interferometer was produced by designing the optical path from the one-DoF laser interferometer. The system employs two three-DoF interferometers to detect two position errors and three angular errors of the nano-stage. The experimental set-ups and measuring procedure and a systematic calculated method for the error verification are presented as well. The resolution of measuring the angular errors component is about 0.06′′.
AB - In this paper, it presents a useful dual-axial five-degrees-of-freedom measuring system with five degrees of freedom (DoFs) for the simultaneous measurement of five-DoF motion errors of a nano-stage. The system integrates a miniature fibre-coupled laser interferometer with specially designed optical paths and quadrant detectors, capable of measuring five-DoF motion errors. It presents a new precision five-DoF measuring system which has been developed and implemented for the simultaneous measurement of five-DoF motion errors (two linear positions, as well as pitch, roll, and yaw) of a nano-stage. In this paper, the five-DoF laser interferometer was produced by designing the optical path from the one-DoF laser interferometer. The system employs two three-DoF interferometers to detect two position errors and three angular errors of the nano-stage. The experimental set-ups and measuring procedure and a systematic calculated method for the error verification are presented as well. The resolution of measuring the angular errors component is about 0.06′′.
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U2 - 10.1243/09544054JEM1269
DO - 10.1243/09544054JEM1269
M3 - Review article
AN - SCOPUS:67651174348
VL - 223
SP - 443
EP - 448
JO - Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
JF - Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
SN - 0954-4054
IS - 4
ER -