Development of a private cloud-based new-generation virtual metrology system

Min Hsiung Hung, Yu Chuan Lin, Hsien Cheng Huang, Chia Chun Tu, Fan Tien Cheng

研究成果: Conference article同行評審

摘要

Automatic virtual metrology (AVM) is the highest-level technology for VM applications from the perspective of automation. The existing PC-server-based AVM systems suffer several limitations, such as being incapable of parallel processing, having no high-Availability and fault-tolerance consideration, etc. The new model of IT usage and advantage offered by the emerging cloud computing can bring commercial benefits to industries. In this paper, we based on private cloud architecture and virtualization technology to develop a novel cloud-based AVM system for overcoming the shortcomings of the existing AVM system. Integrated test results in a case study applying the AVM system to perform VM tasks for semiconductor equipment show that the proposed cloud-based AVM system could demonstrate a significant performance improvement over the existing PC-based AVM system, while achieving the similar prediction accuracy. This paper can be a useful reference for industrial practitioners to construct cloud-based equipment monitoring systems.

原文English
文章編號6899434
頁(從 - 到)910-915
頁數6
期刊IEEE International Conference on Automation Science and Engineering
2014-January
DOIs
出版狀態Published - 2014 一月 1
事件2014 IEEE International Conference on Automation Science and Engineering, CASE 2014 - Taipei, Taiwan
持續時間: 2014 八月 182014 八月 22

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

指紋 深入研究「Development of a private cloud-based new-generation virtual metrology system」主題。共同形成了獨特的指紋。

引用此