Development of a web-services-based e-diagnostics framework

Min Hsiung Hung, Fan Tien Cheng, Sze Chien Yeh

研究成果: Conference article同行評審

6 引文 斯高帕斯(Scopus)


In recent years, the emerging Web-services technology has provided a new and excellent solution to the data integration among heterogeneous systems. In this paper, a Web-services-based e-diagnostics framework (WSDF) is proposed. It can achieve the automation of diagnostic processes and diagnostics-information integration for semiconductor equipment. First, the system framework and the system component model are designed. Then, the object-oriented analysis and design of system components are accomplished. In particular, for the purpose of code reuse, several common functions, such as SOAP communication, UDDI registration, security mechanism, data exchange mechanism, and local database access, are built into a generic component, called Web-service Agent. By inheriting the Web-service Agent, other system components can be constructed and have these common functions. In addition, a generic equipment object model, a unified authentication-service mechanism, and a safe network connection are also designed in the framework. WSDF is intended to support the e-diagnostics functions defined by International SEMATECH. It is believed that WSDF can be applied to construct e-diagnostics systems for semiconductor manufacturing industry.

頁(從 - 到)596-603
期刊Proceedings - IEEE International Conference on Robotics and Automation
出版狀態Published - 2003
事件2003 IEEE International Conference on Robotics and Automation - Taipei, Taiwan
持續時間: 2003 9月 142003 9月 19

All Science Journal Classification (ASJC) codes

  • 軟體
  • 控制與系統工程
  • 人工智慧
  • 電氣與電子工程


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