Development of a web-services-based e-diagnostics framework for semiconductor manufacturing industry

Min Hsiung Hung, Fan Tien Cheng, Sze Chien Yeh

研究成果: Article同行評審

55 引文 斯高帕斯(Scopus)

摘要

Recently, the emerging Web-Services technology has provided a new and excellent solution to the data integration among heterogeneous systems. In this paper, a Web-Services-based e-diagnostics framework (WSDF) is proposed. It can achieve the automation of diagnostic processes and diagnostics information integration for semiconductor equipment. First, the system framework and the system component model are designed. Then, the object-oriented analysis and design of system components are accomplished. In particular, for the purpose of code reuse, several common functions, such as simple object access protocol communication, universal description discovery and integration registration, security mechanism, data exchange mechanism, and local database access, are built into a generic component called Web-Service agent. By inheriting the Web-Service agent, other system components can be constructed and have these common functions. In addition, a unified authentication-service mechanism and a safe network connection are also designed in the framework. WSDF is intended to support the e-diagnostics functions defined by International SEMATECH. It is believed that WSDF can be applied to construct e-diagnostics systems for the semiconductor manufacturing industry.

原文English
頁(從 - 到)122-135
頁數14
期刊IEEE Transactions on Semiconductor Manufacturing
18
發行號1
DOIs
出版狀態Published - 2005 2月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 工業與製造工程
  • 電氣與電子工程

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