TY - JOUR
T1 - Development of a web-services-based e-diagnostics framework for semiconductor manufacturing industry
AU - Hung, Min Hsiung
AU - Cheng, Fan Tien
AU - Yeh, Sze Chien
N1 - Funding Information:
Manuscript received May 15, 2003; revised May 28, 2004. This work was supported by the National Science Council of the Republic of China under Contract NSC 91-2212-E-014-011, Contract NSC 92-2212-E-014-003, and Contract NSC 92-2212-E-006-098. This paper was presented in part at the IEEE International Conference on Robotics and Automation, Taipei, Taiwan, R.O.C., 2003.
PY - 2005/2
Y1 - 2005/2
N2 - Recently, the emerging Web-Services technology has provided a new and excellent solution to the data integration among heterogeneous systems. In this paper, a Web-Services-based e-diagnostics framework (WSDF) is proposed. It can achieve the automation of diagnostic processes and diagnostics information integration for semiconductor equipment. First, the system framework and the system component model are designed. Then, the object-oriented analysis and design of system components are accomplished. In particular, for the purpose of code reuse, several common functions, such as simple object access protocol communication, universal description discovery and integration registration, security mechanism, data exchange mechanism, and local database access, are built into a generic component called Web-Service agent. By inheriting the Web-Service agent, other system components can be constructed and have these common functions. In addition, a unified authentication-service mechanism and a safe network connection are also designed in the framework. WSDF is intended to support the e-diagnostics functions defined by International SEMATECH. It is believed that WSDF can be applied to construct e-diagnostics systems for the semiconductor manufacturing industry.
AB - Recently, the emerging Web-Services technology has provided a new and excellent solution to the data integration among heterogeneous systems. In this paper, a Web-Services-based e-diagnostics framework (WSDF) is proposed. It can achieve the automation of diagnostic processes and diagnostics information integration for semiconductor equipment. First, the system framework and the system component model are designed. Then, the object-oriented analysis and design of system components are accomplished. In particular, for the purpose of code reuse, several common functions, such as simple object access protocol communication, universal description discovery and integration registration, security mechanism, data exchange mechanism, and local database access, are built into a generic component called Web-Service agent. By inheriting the Web-Service agent, other system components can be constructed and have these common functions. In addition, a unified authentication-service mechanism and a safe network connection are also designed in the framework. WSDF is intended to support the e-diagnostics functions defined by International SEMATECH. It is believed that WSDF can be applied to construct e-diagnostics systems for the semiconductor manufacturing industry.
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U2 - 10.1109/TSM.2004.836664
DO - 10.1109/TSM.2004.836664
M3 - Article
AN - SCOPUS:13844276770
SN - 0894-6507
VL - 18
SP - 122
EP - 135
JO - IEEE Transactions on Semiconductor Manufacturing
JF - IEEE Transactions on Semiconductor Manufacturing
IS - 1
ER -