Development of Advanced Manufacturing Cloud of Things (AMCoT)-A Smart Manufacturing Platform

研究成果: Article

27 引文 (Scopus)

摘要

As semiconductor manufacturing processes are becoming more and more sophisticated, how to maintain their feasible production yield becomes an important issue. Also, how to build a smart manufacturing platform that can facilitate realizing smart factories is essential and desirable for current manufacturing industries. Aimed at addressing the above-mentioned two issues, in this letter, a five-stage approach for enhancing and assuring yield is proposed. Also, a smart manufacturing platform-Advanced Manufacturing Cloud of Things (AMCoT) based on Internet of Things, cloud computing, big data analytics, cyber-physical systems, and prediction technologies is designed and implemented to realize the proposed five-stage approach of yield enhancement and assurance. Finally, AMCoT is applied to a bumping process of a semiconductor company in Taiwan to conduct industrial case studies. Testing results demonstrate that AMCoT possesses capabilities of conducting total inspection in production, providing prognosis, and predictive maintenance on equipment, finding the root cause of yield loss, and storing and handling big production data, which as a whole is promising to achieve the goal of zero defects.

原文English
文章編號7932169
頁(從 - 到)1809-1816
頁數8
期刊IEEE Robotics and Automation Letters
2
發行號3
DOIs
出版狀態Published - 2017 七月 1

指紋

Thing
Manufacturing
Internet of Things
Semiconductor Manufacturing
Manufacturing Industries
Prognosis
Taiwan
Cloud Computing
Semiconductor materials
Inspection
Semiconductors
Maintenance
Enhancement
Defects
Cloud computing
Roots
Industrial plants
Testing
Industry
Prediction

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Human-Computer Interaction
  • Biomedical Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Artificial Intelligence
  • Computer Science Applications
  • Computer Vision and Pattern Recognition

引用此文

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abstract = "As semiconductor manufacturing processes are becoming more and more sophisticated, how to maintain their feasible production yield becomes an important issue. Also, how to build a smart manufacturing platform that can facilitate realizing smart factories is essential and desirable for current manufacturing industries. Aimed at addressing the above-mentioned two issues, in this letter, a five-stage approach for enhancing and assuring yield is proposed. Also, a smart manufacturing platform-Advanced Manufacturing Cloud of Things (AMCoT) based on Internet of Things, cloud computing, big data analytics, cyber-physical systems, and prediction technologies is designed and implemented to realize the proposed five-stage approach of yield enhancement and assurance. Finally, AMCoT is applied to a bumping process of a semiconductor company in Taiwan to conduct industrial case studies. Testing results demonstrate that AMCoT possesses capabilities of conducting total inspection in production, providing prognosis, and predictive maintenance on equipment, finding the root cause of yield loss, and storing and handling big production data, which as a whole is promising to achieve the goal of zero defects.",
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AU - Lin, Yu Chuan

AU - Hung, Min Hsiung

AU - Huang, Hsien Cheng

AU - Chen, Chao Chun

AU - Yang, Haw Ching

AU - Hsieh, Yao Sheng

AU - Cheng, Fan Tien

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AB - As semiconductor manufacturing processes are becoming more and more sophisticated, how to maintain their feasible production yield becomes an important issue. Also, how to build a smart manufacturing platform that can facilitate realizing smart factories is essential and desirable for current manufacturing industries. Aimed at addressing the above-mentioned two issues, in this letter, a five-stage approach for enhancing and assuring yield is proposed. Also, a smart manufacturing platform-Advanced Manufacturing Cloud of Things (AMCoT) based on Internet of Things, cloud computing, big data analytics, cyber-physical systems, and prediction technologies is designed and implemented to realize the proposed five-stage approach of yield enhancement and assurance. Finally, AMCoT is applied to a bumping process of a semiconductor company in Taiwan to conduct industrial case studies. Testing results demonstrate that AMCoT possesses capabilities of conducting total inspection in production, providing prognosis, and predictive maintenance on equipment, finding the root cause of yield loss, and storing and handling big production data, which as a whole is promising to achieve the goal of zero defects.

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