Development of an automatic virtual metrology framework for TFT-LCD industry

Min Hsiung Hung, Hsien Cheng Huang, Haw Ching Yang, Fan Tien Cheng

研究成果: Conference contribution

7 引文 斯高帕斯(Scopus)

摘要

An automatic virtual metrology framework (AVMF) for the TFT-LCD industry is designed and implemented in this paper. The AVMF has capabilities of creating VM models, deploying and refreshing VM models, monitoring and managing VM systems remotely, storing model data and conjectured results centrally, and providing various friendly graphical user interfaces. Pluggable interfaces and functional modules are developed in the AVMF. Thus, by plugging the associated functional module according to desired requirements, the AVMF can be applied to different types of equipment. In turn, applying the AVMF to all pieces of equipment in the factory can be easily achieved. A paradigm AVM system for our cooperative TFT-LCD company is constructed. Integrated testing results show that the paradigm AVMS works smoothly, meets the desired functional requirements, and demonstrates a good performance. It is believed that the developed AVMF can be practically applied in the TFT-LCD industries.

原文English
主出版物標題2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
頁面879-884
頁數6
DOIs
出版狀態Published - 2010 11月 17
事件2010 IEEE International Conference on Automation Science and Engineering, CASE 2010 - Toronto, ON, Canada
持續時間: 2010 8月 212010 8月 24

出版系列

名字2010 IEEE International Conference on Automation Science and Engineering, CASE 2010

Other

Other2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
國家/地區Canada
城市Toronto, ON
期間10-08-2110-08-24

All Science Journal Classification (ASJC) codes

  • 控制與系統工程

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