TY - GEN
T1 - Development of an automatic virtual metrology framework for TFT-LCD industry
AU - Hung, Min Hsiung
AU - Huang, Hsien Cheng
AU - Yang, Haw Ching
AU - Cheng, Fan Tien
PY - 2010
Y1 - 2010
N2 - An automatic virtual metrology framework (AVMF) for the TFT-LCD industry is designed and implemented in this paper. The AVMF has capabilities of creating VM models, deploying and refreshing VM models, monitoring and managing VM systems remotely, storing model data and conjectured results centrally, and providing various friendly graphical user interfaces. Pluggable interfaces and functional modules are developed in the AVMF. Thus, by plugging the associated functional module according to desired requirements, the AVMF can be applied to different types of equipment. In turn, applying the AVMF to all pieces of equipment in the factory can be easily achieved. A paradigm AVM system for our cooperative TFT-LCD company is constructed. Integrated testing results show that the paradigm AVMS works smoothly, meets the desired functional requirements, and demonstrates a good performance. It is believed that the developed AVMF can be practically applied in the TFT-LCD industries.
AB - An automatic virtual metrology framework (AVMF) for the TFT-LCD industry is designed and implemented in this paper. The AVMF has capabilities of creating VM models, deploying and refreshing VM models, monitoring and managing VM systems remotely, storing model data and conjectured results centrally, and providing various friendly graphical user interfaces. Pluggable interfaces and functional modules are developed in the AVMF. Thus, by plugging the associated functional module according to desired requirements, the AVMF can be applied to different types of equipment. In turn, applying the AVMF to all pieces of equipment in the factory can be easily achieved. A paradigm AVM system for our cooperative TFT-LCD company is constructed. Integrated testing results show that the paradigm AVMS works smoothly, meets the desired functional requirements, and demonstrates a good performance. It is believed that the developed AVMF can be practically applied in the TFT-LCD industries.
UR - http://www.scopus.com/inward/record.url?scp=78149418922&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78149418922&partnerID=8YFLogxK
U2 - 10.1109/COASE.2010.5584541
DO - 10.1109/COASE.2010.5584541
M3 - Conference contribution
AN - SCOPUS:78149418922
SN - 9781424454471
T3 - 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
SP - 879
EP - 884
BT - 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
T2 - 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
Y2 - 21 August 2010 through 24 August 2010
ER -