TY - JOUR
T1 - Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations
AU - Hung, Min Hsiung
AU - Chen, Kuan Yii
AU - Ho, Rui Wen
AU - Cheng, Fan Tien
N1 - Funding Information:
The authors would like to thank the National Science Council of the Republic of China for financially supporting this research under Contract No. NSC-91-2212-E-014-011, NSC-92-2212-E-014-003, and NSC-92-2212-E-006-098.
PY - 2003/7
Y1 - 2003/7
N2 - In recent years, the concept of e-Diagnostics and e-Maintenance is proposed in the semiconductor industry. By using Internet and information technologies, e-Diagnostics and e-Maintenance intend to provide equipment specialists with the remote capabilities of connectivity, manipulation, configuration, performance monitoring, and data collection and analysis on equipment to achieve the goal of promptly diagnosing, repairing, and maintaining equipment. In this paper, new-generation information software technologies and object-oriented technologies, such as Web Services, XML signature, XML encryption, UML, etc. are used to develop an e-Diagnostics/Maintenance framework with security considerations. The proposed framework can achieve the automaton of diagnostic processes and the integration of diagnostics and maintenance information under a secure communication infrastructure.
AB - In recent years, the concept of e-Diagnostics and e-Maintenance is proposed in the semiconductor industry. By using Internet and information technologies, e-Diagnostics and e-Maintenance intend to provide equipment specialists with the remote capabilities of connectivity, manipulation, configuration, performance monitoring, and data collection and analysis on equipment to achieve the goal of promptly diagnosing, repairing, and maintaining equipment. In this paper, new-generation information software technologies and object-oriented technologies, such as Web Services, XML signature, XML encryption, UML, etc. are used to develop an e-Diagnostics/Maintenance framework with security considerations. The proposed framework can achieve the automaton of diagnostic processes and the integration of diagnostics and maintenance information under a secure communication infrastructure.
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U2 - 10.1016/j.aei.2004.07.004
DO - 10.1016/j.aei.2004.07.004
M3 - Article
AN - SCOPUS:5044251650
SN - 1474-0346
VL - 17
SP - 165
EP - 178
JO - Advanced Engineering Informatics
JF - Advanced Engineering Informatics
IS - 3-4
ER -