Development of an object-based equipment controller for semiconductor equipment communications

Jun Yan Deng, Fan Tien Cheng, Kevin Nguyen

研究成果: Paper

3 引文 (Scopus)

摘要

SEMATECH developed the CIM Framework Specification to facilitate the creation of an integrated, common, flexible, modular object model leading to an open, multi-supplier CIM system environment in the semiconductor industry. However, all the equipment must comply with the SEMI SECS/GEM standards to interface with the CIM Framework's Machine Management Components. SEMI is developing an Object-Based Equipment Model (OBEM) standard to take full advantage of the CIM Framework. With OBEM, the equipment can communicate with the CIM Framework directly by method invocation. This work develops OBEM-compliant object-based equipment (OBE) in the MES Framework environment, such that this equipment can directly communicate with the MES Framework, without using the SECS/GEM protocol. Therefore, a systematic approach for developing this object-based system using object technology is proposed. The Unified Modeling Language (UML) is adopted as the major tool for analyzing and developing the target system. A SECS/GEM adapter is also added on the OBE to enable the OBE to be integrated with a Legacy Factory which can only use SECS/GEM standards. A die bonder is used as example equipment for development demonstrations.

原文English
頁面1240-1245
頁數6
出版狀態Published - 1999 十二月 1
事件The 25th Annual Conference of the IEEE Industrial Electronics Society (IECON'99) - San Jose, CA, USA
持續時間: 1999 十一月 291999 十二月 3

Other

OtherThe 25th Annual Conference of the IEEE Industrial Electronics Society (IECON'99)
城市San Jose, CA, USA
期間99-11-2999-12-03

指紋

Semiconductor materials
Controllers
Communication
Air cushion vehicles
Unified Modeling Language
Industrial plants
Demonstrations
Specifications
Network protocols
Industry

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

引用此文

Deng, J. Y., Cheng, F. T., & Nguyen, K. (1999). Development of an object-based equipment controller for semiconductor equipment communications. 1240-1245. 論文發表於 The 25th Annual Conference of the IEEE Industrial Electronics Society (IECON'99), San Jose, CA, USA, .
Deng, Jun Yan ; Cheng, Fan Tien ; Nguyen, Kevin. / Development of an object-based equipment controller for semiconductor equipment communications. 論文發表於 The 25th Annual Conference of the IEEE Industrial Electronics Society (IECON'99), San Jose, CA, USA, .6 p.
@conference{2e99dadd80ea4f25a81ecf63369b71bb,
title = "Development of an object-based equipment controller for semiconductor equipment communications",
abstract = "SEMATECH developed the CIM Framework Specification to facilitate the creation of an integrated, common, flexible, modular object model leading to an open, multi-supplier CIM system environment in the semiconductor industry. However, all the equipment must comply with the SEMI SECS/GEM standards to interface with the CIM Framework's Machine Management Components. SEMI is developing an Object-Based Equipment Model (OBEM) standard to take full advantage of the CIM Framework. With OBEM, the equipment can communicate with the CIM Framework directly by method invocation. This work develops OBEM-compliant object-based equipment (OBE) in the MES Framework environment, such that this equipment can directly communicate with the MES Framework, without using the SECS/GEM protocol. Therefore, a systematic approach for developing this object-based system using object technology is proposed. The Unified Modeling Language (UML) is adopted as the major tool for analyzing and developing the target system. A SECS/GEM adapter is also added on the OBE to enable the OBE to be integrated with a Legacy Factory which can only use SECS/GEM standards. A die bonder is used as example equipment for development demonstrations.",
author = "Deng, {Jun Yan} and Cheng, {Fan Tien} and Kevin Nguyen",
year = "1999",
month = "12",
day = "1",
language = "English",
pages = "1240--1245",
note = "The 25th Annual Conference of the IEEE Industrial Electronics Society (IECON'99) ; Conference date: 29-11-1999 Through 03-12-1999",

}

Deng, JY, Cheng, FT & Nguyen, K 1999, 'Development of an object-based equipment controller for semiconductor equipment communications', 論文發表於 The 25th Annual Conference of the IEEE Industrial Electronics Society (IECON'99), San Jose, CA, USA, 99-11-29 - 99-12-03 頁 1240-1245.

Development of an object-based equipment controller for semiconductor equipment communications. / Deng, Jun Yan; Cheng, Fan Tien; Nguyen, Kevin.

1999. 1240-1245 論文發表於 The 25th Annual Conference of the IEEE Industrial Electronics Society (IECON'99), San Jose, CA, USA, .

研究成果: Paper

TY - CONF

T1 - Development of an object-based equipment controller for semiconductor equipment communications

AU - Deng, Jun Yan

AU - Cheng, Fan Tien

AU - Nguyen, Kevin

PY - 1999/12/1

Y1 - 1999/12/1

N2 - SEMATECH developed the CIM Framework Specification to facilitate the creation of an integrated, common, flexible, modular object model leading to an open, multi-supplier CIM system environment in the semiconductor industry. However, all the equipment must comply with the SEMI SECS/GEM standards to interface with the CIM Framework's Machine Management Components. SEMI is developing an Object-Based Equipment Model (OBEM) standard to take full advantage of the CIM Framework. With OBEM, the equipment can communicate with the CIM Framework directly by method invocation. This work develops OBEM-compliant object-based equipment (OBE) in the MES Framework environment, such that this equipment can directly communicate with the MES Framework, without using the SECS/GEM protocol. Therefore, a systematic approach for developing this object-based system using object technology is proposed. The Unified Modeling Language (UML) is adopted as the major tool for analyzing and developing the target system. A SECS/GEM adapter is also added on the OBE to enable the OBE to be integrated with a Legacy Factory which can only use SECS/GEM standards. A die bonder is used as example equipment for development demonstrations.

AB - SEMATECH developed the CIM Framework Specification to facilitate the creation of an integrated, common, flexible, modular object model leading to an open, multi-supplier CIM system environment in the semiconductor industry. However, all the equipment must comply with the SEMI SECS/GEM standards to interface with the CIM Framework's Machine Management Components. SEMI is developing an Object-Based Equipment Model (OBEM) standard to take full advantage of the CIM Framework. With OBEM, the equipment can communicate with the CIM Framework directly by method invocation. This work develops OBEM-compliant object-based equipment (OBE) in the MES Framework environment, such that this equipment can directly communicate with the MES Framework, without using the SECS/GEM protocol. Therefore, a systematic approach for developing this object-based system using object technology is proposed. The Unified Modeling Language (UML) is adopted as the major tool for analyzing and developing the target system. A SECS/GEM adapter is also added on the OBE to enable the OBE to be integrated with a Legacy Factory which can only use SECS/GEM standards. A die bonder is used as example equipment for development demonstrations.

UR - http://www.scopus.com/inward/record.url?scp=0033282066&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033282066&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0033282066

SP - 1240

EP - 1245

ER -

Deng JY, Cheng FT, Nguyen K. Development of an object-based equipment controller for semiconductor equipment communications. 1999. 論文發表於 The 25th Annual Conference of the IEEE Industrial Electronics Society (IECON'99), San Jose, CA, USA, .