Development of fixed-point two-degree-of-freedom angular error measurement system with precision improvement function

Yu Ming Su, Chien Sheng Liu

研究成果: Article同行評審

摘要

In the field of precision industries, measuring micro-angular errors plays a crucial role in improving the accuracy of equipment. Therefore, this study aims to develop a two-degree-of-freedom (two-DOF) angular error measurement system for simultaneously measuring the assembly angle errors of the bond head in a die bonding machine. This system is based on the laser collimation method and constructed by using components such as a fiber laser and position-sensitive detectors. It utilizes the angular drift compensation of the laser beam and averaging function to improve the measurement accuracy. In addition, the mathematical model of the proposed system was established by using skew-ray tracing. Through experiments, the measuring accuracy of ±0.25 arcsec and measuring repeatability of 0.3 arcsec could be achieved.

原文English
文章編號055105
期刊Review of Scientific Instruments
95
發行號5
DOIs
出版狀態Published - 2024 5月 1

All Science Journal Classification (ASJC) codes

  • 儀器

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