In this study, a ceramic formulation based on (Ca,Sr)(Ti,Zr)O3 with sintering aids is investigated to reduce the sintering temperature below 1050°C for co-firing with Cu inner electrode. The present study deals with the fabrication of 0402 multilayer ceramic capacitors (MLCCs) based on the optimization of sintering aid and CSTZ formulation. The sintering profile in reducing atmosphere has been optimized to enhance the characteristics of the MLCCs with Cu inner electrode. MLCCs cofired with three Cu inner electrodes with 32m dielectric thickness show very promising performance (C ∼ 3.2pF/2 active layers; ESR∼30 Ω:τε = -15ppm/K; tgδ< 10 -4; I.R.> 1012Ω cm) and meeting NPO tempertaure characteristic (-55°C to 125°C ΔC/C< ±30 ppm).
All Science Journal Classification (ASJC) codes