Development of porous ZnO thin films for enhancing piezoelectric nanogenerators and force sensors

Ping Che Lee, Yu Liang Hsiao, Jit Dutta, Ruey Chi Wang, Shih Wen Tseng, Chuan Pu Liu

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

摘要

The applications of piezoelectric nanogenerators (PENGs) as a sustainable power source for portable electronic devices are still limited due to low voltage output ranging from mini- to several volts. In this study, we first develop a porous ZnO structure by annealing (650–950 °C) sputtered ZnO thin film. The porous ZnO thin film enables a significant enhancement in the output voltage of primitive PENG (up to 3 mV), i.e., by 7.5 times than that of pristine ZnO (0.4 mV). Concurrently, the introduction of pores in ZnO thin films leads to a 6.9-fold enhancement in the sensitivity of piezotronic force sensor compared to the pristine one. These excellent performances are further supported by up to two-fold enhancement in the piezoelectric coefficient (2.62 pm/V) than that of pristine ZnO (1.12 pm/V). Herein, we conducted transmission electron microscopy characterizations and found that this phenomenon can be ascribed to the lattice contraction in the c-direction induced by the pores. The diffusion-controlled pore formation mechanism is elucidated.

原文English
文章編號105702
期刊Nano Energy
82
DOIs
出版狀態Published - 2021 四月

All Science Journal Classification (ASJC) codes

  • 可再生能源、永續發展與環境
  • 材料科學(全部)
  • 電氣與電子工程

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