Development of precise autofocusing microscope based on reduction of geometrical fluctuations

Chien Sheng Liu, Kun Wei Lin, Sheng Hong Jiang

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

摘要

In keeping with consumer preferences for ever more high-performance products, a requirement exists for precise autofocusing microscope systems for the inspection processes in mass production lines. Accordingly, a precise autofocusing microscope is proposed based on the reduction of the geometrical fluctuations of a laser light source, in which, the geometrical fluctuations of the laser light source are reduced via an optical diffuser. An autofocusing capability of proposed system is achieved by using position feedback signals from the centroid (xcentroid, ycentroid) of the image of the reflected laser beam captured from a CCD sensor. The experimental results show that the proposed system has a positioning accuracy of 1.5 μm with a working range of ±200 μm. Compared to conventional centroid method, it is shown that our proposed system has improved autofocusing positioning accuracy.

原文English
主出版物標題2012 Proceedings of SICE Annual Conference, SICE 2012
發行者Society of Instrument and Control Engineers (SICE)
頁面967-972
頁數6
ISBN(列印)9781467322591
出版狀態Published - 2012 一月 1
事件2012 51st Annual Conference on of the Society of Instrument and Control Engineers of Japan, SICE 2012 - Akita, Japan
持續時間: 2012 八月 202012 八月 23

出版系列

名字Proceedings of the SICE Annual Conference

Other

Other2012 51st Annual Conference on of the Society of Instrument and Control Engineers of Japan, SICE 2012
國家/地區Japan
城市Akita
期間12-08-2012-08-23

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 電腦科學應用
  • 電氣與電子工程

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