Digital image correlation of SEM images for surface deformation of CMOS IC

Terry Yuan Fang Chen, Tzu Ching Chen, Fa Yen Cheng, Ang Ting Tsai, Ming Tzer Lin

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

指紋

深入研究「Digital image correlation of SEM images for surface deformation of CMOS IC」主題。共同形成了獨特的指紋。

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds