Digital image correlation of SEM images for surface deformation of CMOS IC

Terry Yuan Fang Chen, Tzu Ching Chen, Fa Yen Cheng, Ang Ting Tsai, Ming Tzer Lin

研究成果: Article › 同行評審

3 引文 斯高帕斯（Scopus）

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Physics & Astronomy

Engineering & Materials Science

Chemical Compounds