Direct imprinting on a polycarbonate substrate with a compressed air press for polarizer applications

Chun Hung Lin, Hsi Ho Lin, Wen Yu Chen, Tsung Chieh Cheng

研究成果: Article同行評審

7 引文 斯高帕斯(Scopus)

摘要

In this study, simple two-step processes were used to fabricate the wire-grid polarizer (WGP) on a polycarbonate (PC) sheet. The PC gratings were fabricated by direct imprinting of the PC sheet onto a silicon mold with a compressed air press (CAP). No additional imprinted polymer was required in the imprinting step. The applied pressure of 5 bar was much lower than the pressure reported in the literature, which was due to the use of the CAP. The WGP was further fabricated with an oblique aluminum (Al) sputtering on the PC grating. The rigorous coupled-wave analysis (RCWA) was performed to explain and verify the experimental results. The fabricated WGP should have potential application in the infrared region.

原文English
頁(從 - 到)2026-2029
頁數4
期刊Microelectronic Engineering
88
發行號8
DOIs
出版狀態Published - 2011 八月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 電氣與電子工程

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