In this paper, we propose a new method for preparing high-density nanometer-scale SiGe quantum dots on ordered mesoporous sol gel silica-coated Si substrate. It was found that a SiGe dot matrix has formed in the porous silica media, and a second layer of bigger overgrown SiGe dots was also observable. X-Ray diffraction measurements suggest the formation of the buried dots. Preliminary photoluminescence experiments show promising emission related to the buried dots.
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