摘要
This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.
| 原文 | English |
|---|---|
| 主出版物標題 | TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems |
| 頁面 | 113-116 |
| 頁數 | 4 |
| DOIs | |
| 出版狀態 | Published - 2007 |
| 事件 | 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France 持續時間: 2007 六月 10 → 2007 六月 14 |
Other
| Other | 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 |
|---|---|
| 國家 | France |
| 城市 | Lyon |
| 期間 | 07-06-10 → 07-06-14 |
指紋
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Electrical and Electronic Engineering
引用此文
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Direct metal imprinting lithography based on pulsed laser heating. / Lee, Yung Chun; Chen, Chun Hung.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 113-116 4300084.研究成果: Conference contribution
TY - GEN
T1 - Direct metal imprinting lithography based on pulsed laser heating
AU - Lee, Yung Chun
AU - Chen, Chun Hung
PY - 2007
Y1 - 2007
N2 - This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.
AB - This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.
UR - http://www.scopus.com/inward/record.url?scp=50049103423&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50049103423&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2007.4300084
DO - 10.1109/SENSOR.2007.4300084
M3 - Conference contribution
AN - SCOPUS:50049103423
SN - 1424408423
SN - 9781424408429
SP - 113
EP - 116
BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
ER -