Direct metal imprinting lithography based on pulsed laser heating

Yung Chun Lee; Chun Hung Chen

doi:10.1109/SENSOR.2007.4300084

Direct metal imprinting lithography based on pulsed laser heating

研究成果: Conference contribution

摘要

This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.

原文	English
主出版物標題	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
頁面	113-116
頁數	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300084
出版狀態	Published - 2007
事件	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France 持續時間: 2007 六月 10 → 2007 六月 14

Other

Other	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
國家	France
城市	Lyon
期間	07-06-10 → 07-06-14

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

存取文件

10.1109/SENSOR.2007.4300084

指紋深入研究「Direct metal imprinting lithography based on pulsed laser heating」主題。共同形成了獨特的指紋。

引用此

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Lee, YC & Chen, CH 2007, Direct metal imprinting lithography based on pulsed laser heating. 於 TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300084, 頁 113-116, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 07-06-10. https://doi.org/10.1109/SENSOR.2007.4300084

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