TY - GEN
T1 - Direct metal imprinting lithography based on pulsed laser heating
AU - Lee, Yung Chun
AU - Chen, Chun Hung
PY - 2007
Y1 - 2007
N2 - This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.
AB - This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.
UR - http://www.scopus.com/inward/record.url?scp=50049103423&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50049103423&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2007.4300084
DO - 10.1109/SENSOR.2007.4300084
M3 - Conference contribution
AN - SCOPUS:50049103423
SN - 1424408423
SN - 9781424408429
T3 - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 113
EP - 116
BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Y2 - 10 June 2007 through 14 June 2007
ER -