Direct metal imprinting lithography based on pulsed laser heating

研究成果: Conference contribution

摘要

This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.

原文English
主出版物標題TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
頁面113-116
頁數4
DOIs
出版狀態Published - 2007
事件4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
持續時間: 2007 六月 102007 六月 14

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
國家France
城市Lyon
期間07-06-1007-06-14

指紋

Laser heating
Pulsed lasers
Lithography
Etching
Chromium
Metallic films
Substrates
Metals
Nanotechnology
Printing
Masks
Laser pulses
Infrared radiation
Lasers
Experiments

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

引用此文

Lee, Y. C., & Chen, C. H. (2007). Direct metal imprinting lithography based on pulsed laser heating. 於 TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (頁 113-116). [4300084] https://doi.org/10.1109/SENSOR.2007.4300084
Lee, Yung Chun ; Chen, Chun Hung. / Direct metal imprinting lithography based on pulsed laser heating. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. 頁 113-116
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Lee, YC & Chen, CH 2007, Direct metal imprinting lithography based on pulsed laser heating. 於 TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300084, 頁 113-116, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 07-06-10. https://doi.org/10.1109/SENSOR.2007.4300084

Direct metal imprinting lithography based on pulsed laser heating. / Lee, Yung Chun; Chen, Chun Hung.

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 113-116 4300084.

研究成果: Conference contribution

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Lee YC, Chen CH. Direct metal imprinting lithography based on pulsed laser heating. 於 TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 113-116. 4300084 https://doi.org/10.1109/SENSOR.2007.4300084