Direct metal imprinting lithography based on pulsed laser heating

研究成果: Conference contribution

摘要

This paper reports a novel contact printing method which can transfer patterned metallic films directly from a mold to a substrate, based on applied contact pressure and infrared pulse laser heating. Experiments have been carried out using a 1064 nm pulsed Nd:YAG laser to demonstrate the feasibility of the proposed method. Chromium (Cr) films of 70 nm thickness with both array-dot patterns and linear grating patterns of typically 500 nm feature sizes are successfully transferred. The transferred Cr patterns can serve as an etching mask for subsequent etching on the substrate. Potentials of applying this method for nano-patterning and nano-fabrication are addressed.

原文English
主出版物標題TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
頁面113-116
頁數4
DOIs
出版狀態Published - 2007
事件4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
持續時間: 2007 六月 102007 六月 14

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
國家France
城市Lyon
期間07-06-1007-06-14

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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