Direct oxidation of si1-xGex layers using vacuum-ultra-violet light radiation in oxygen

Liang Po Chen; Yuen Chang Chan; Shoou Jinn Chang; Guo Wei Huang; Chun Yen Chang

doi:10.1143/jjap.37.l122

Direct oxidation of si_1-xGe_x layers using vacuum-ultra-violet light radiation in oxygen

Liang Po Chen
, Yuen Chang Chan
, Shoou Jinn Chang
, Guo Wei Huang
, Chun Yen Chang

微電子工程研究所

研究成果: Article › 同行評審

15 引文斯高帕斯（Scopus）

摘要

Oxidation of Si_1-xGe_x films has been carried out by direct photo chemical vapor deposition (direct photo-CVD) directly with activated O₂ induced by Vacuum-Ultra-Violet (VUV) light radiation. The Auger electron spectroscopy profiles show that no Ge-pileup layer at the oxide/Si_1-xGe_x interface is observed after VUV-induced Si_1-xGe_x oxidation process. The X-ray photoelectron spectroscopy analysis of the samples reveals that Si and Ge are oxidized simultaneously in oxidation process and a mixed oxide layer consisting both SiO₂ and GeO₂ is formed. This might be the reason that Ge pileup effect is eliminated in this study.

原文	English
頁（從 - 到）	L122-L124
期刊	Japanese Journal of Applied Physics
卷	37
發行號	2 PART A
DOIs	https://doi.org/10.1143/jjap.37.l122
出版狀態	Published - 1998 2月 1

All Science Journal Classification (ASJC) codes

一般工程
一般物理與天文學

存取文件

10.1143/jjap.37.l122

其它文件與鏈接

引用此

@article{9d3386ac8ccc48de9bd67b0a0f14a196,

title = "Direct oxidation of si1-xGex layers using vacuum-ultra-violet light radiation in oxygen",

abstract = "Oxidation of Si1-xGex films has been carried out by direct photo chemical vapor deposition (direct photo-CVD) directly with activated O2 induced by Vacuum-Ultra-Violet (VUV) light radiation. The Auger electron spectroscopy profiles show that no Ge-pileup layer at the oxide/Si1-xGex interface is observed after VUV-induced Si1-xGex oxidation process. The X-ray photoelectron spectroscopy analysis of the samples reveals that Si and Ge are oxidized simultaneously in oxidation process and a mixed oxide layer consisting both SiO2 and GeO2 is formed. This might be the reason that Ge pileup effect is eliminated in this study.",

author = "Chen, \{Liang Po\} and Chan, \{Yuen Chang\} and Chang, \{Shoou Jinn\} and Huang, \{Guo Wei\} and Chang, \{Chun Yen\}",

year = "1998",

month = feb,

day = "1",

doi = "10.1143/jjap.37.l122",

language = "English",

volume = "37",

pages = "L122--L124",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

publisher = "Institute of Physics",

number = "2 PART A",

}

TY - JOUR

T1 - Direct oxidation of si1-xGex layers using vacuum-ultra-violet light radiation in oxygen

AU - Chen, Liang Po

AU - Chan, Yuen Chang

AU - Chang, Shoou Jinn

AU - Huang, Guo Wei

AU - Chang, Chun Yen

PY - 1998/2/1

Y1 - 1998/2/1

N2 - Oxidation of Si1-xGex films has been carried out by direct photo chemical vapor deposition (direct photo-CVD) directly with activated O2 induced by Vacuum-Ultra-Violet (VUV) light radiation. The Auger electron spectroscopy profiles show that no Ge-pileup layer at the oxide/Si1-xGex interface is observed after VUV-induced Si1-xGex oxidation process. The X-ray photoelectron spectroscopy analysis of the samples reveals that Si and Ge are oxidized simultaneously in oxidation process and a mixed oxide layer consisting both SiO2 and GeO2 is formed. This might be the reason that Ge pileup effect is eliminated in this study.

AB - Oxidation of Si1-xGex films has been carried out by direct photo chemical vapor deposition (direct photo-CVD) directly with activated O2 induced by Vacuum-Ultra-Violet (VUV) light radiation. The Auger electron spectroscopy profiles show that no Ge-pileup layer at the oxide/Si1-xGex interface is observed after VUV-induced Si1-xGex oxidation process. The X-ray photoelectron spectroscopy analysis of the samples reveals that Si and Ge are oxidized simultaneously in oxidation process and a mixed oxide layer consisting both SiO2 and GeO2 is formed. This might be the reason that Ge pileup effect is eliminated in this study.

UR - https://www.scopus.com/pages/publications/0031998102

UR - https://www.scopus.com/pages/publications/0031998102#tab=citedBy

U2 - 10.1143/jjap.37.l122

DO - 10.1143/jjap.37.l122

M3 - Article

AN - SCOPUS:0031998102

SN - 0021-4922

VL - 37

SP - L122-L124

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 2 PART A

ER -

Direct oxidation of si1-xGex layers using vacuum-ultra-violet light radiation in oxygen

摘要

All Science Journal Classification (ASJC) codes

存取文件

其它文件與鏈接

指紋

引用此

Direct oxidation of si_1-xGe_x layers using vacuum-ultra-violet light radiation in oxygen