Direct patterning of crystallized BaTiO3 and TiO2 films in aqueous solutions

Tomoaki Watanabe, Masahiro Yoshimura

研究成果: Article

3 引文 斯高帕斯(Scopus)

摘要

A direct patterning instrument and technique were developed that enabled direct fabrication of ceramic film patterns at room temperature, using laser beam activation of the interface between the substrate and an aqueous solution. It was shown that a crystallized BaTiO3 pattern could be fabricated on a titanium substrate with a laser pattern generator, without heat treatment afterwards. The BaTiO3 pattern had a line width of several tens of micrometers. The technique was also used to demonstrate the possibility of fabricating a TiO2 line, several micrometers wide, on a silicon wafer.

原文English
頁(從 - 到)2696-2699
頁數4
期刊Thin Solid Films
515
發行號4
DOIs
出版狀態Published - 2006 十二月 5

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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