Display compatible pMUT device for mid air ultrasound gesture recognition

C. H. Huang, L. Demi, G. B. Torri, S. Mao, M. Billen, Y. Jeong, D. Cheyns, X. Rottenberg, V. Rochus

研究成果: Conference contribution

摘要

In this paper, the design, modeling, and characterization of a display compatible pMUT platform dedicated for mid air ultrasound gesture recognition is presented. A FEM model has been built using COMSOL for evaluating the frequency response, static profile, acoustic pressure, and driving efficiency of our pMUT device across all vibration modes of circular plates. In parallel with it, a first mode analytical model has been developed including electrical, mechanical, and acoustic domains to provide fast estimation for future design. A laser Doppler vibrometer is used to measure the frequency response, displacement, velocity as well as mode shapes of pMUTs with different designs in the air. Besides, an optical profilometer and impedance meter are used to check the static profile and electrical impedance of devices of different sizes, respectively. Finally, a standard reference microphone is used to measure the acoustic pressure of a pMUT inside its frequency range (<125 kHz). The measured resonance frequency of the first mode across 121.5kHz to 1.16MHz with radius from 500um to 120um fits the prediction of FEM and analytical models. The measurements of the acoustic pressure on the transverse axis of a 500um pMUT also fit the values from the acoustic analytical model.

原文English
主出版物標題TechConnect Briefs 2018 - Informatics, Electronics and Microsystems
編輯Matthew Laudon, Fiona Case, Bart Romanowicz, Fiona Case
發行者TechConnect
頁面161-164
頁數4
ISBN(電子)9780998878256
出版狀態Published - 2018 一月 1
事件11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo,the 2018 SBIR/STTR Spring Innovation Conference, and the Defense TechConnect DTC Spring Conference - Anaheim, United States
持續時間: 2018 五月 132018 五月 16

出版系列

名字TechConnect Briefs 2018 - Advanced Materials
4

Other

Other11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo,the 2018 SBIR/STTR Spring Innovation Conference, and the Defense TechConnect DTC Spring Conference
國家United States
城市Anaheim
期間18-05-1318-05-16

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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  • 引用此

    Huang, C. H., Demi, L., Torri, G. B., Mao, S., Billen, M., Jeong, Y., Cheyns, D., Rottenberg, X., & Rochus, V. (2018). Display compatible pMUT device for mid air ultrasound gesture recognition. 於 M. Laudon, F. Case, B. Romanowicz, & F. Case (編輯), TechConnect Briefs 2018 - Informatics, Electronics and Microsystems (頁 161-164). (TechConnect Briefs 2018 - Advanced Materials; 卷 4). TechConnect.