DLTS MEASUREMENT OF BULK DENSITY OF GAP STATES IN PLASMA ENHANCED CVD AMORPHOUS SILICON.

C. Y. Chang, Y. K. Fang, Wei-Chou Hsu, W. L. Lin

研究成果: Paper

2 引文 斯高帕斯(Scopus)
原文English
頁面357-367
頁數11
出版狀態Published - 1981 十二月 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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