TY - JOUR
T1 - DNA hybridization measurement by self-sensing piezoresistive microcantilevers in CMOS biosensor
AU - Yang, S. M.
AU - Chang, C.
AU - Yin, T. I.
AU - Kuo, P. L.
N1 - Funding Information:
The CMOS fabrication was carried out in the National Nano Device Laboratory (NDL), Taiwan, ROC. This work was supported in part by the National Science Council under NSC96-2221-E006-223. S.M. Yang received his PhD in mechanical engineering from the University of California at Berkeley in 1988. He joined the faculty of the National Cheng Kung University, Taiwan in 1989, where he is currently a Professor in the Department of Aeronautics and Astronautics. His research interests are in vibration control, digital signal processing, and microsystem applications. C. Chang received his BS and MS degree in the Department of Aeronautics and Astronautics from the National Cheng Kung University, Taiwan, in 2002 and 2004. He is currently a PhD candidate with research interest in design and fabrication of microsensors. He is also a member of the National Nano Devices Laboratory (NDL), Taiwan. T.I. Yin received his BS degree in the Department of Aeronautics and Astronautics from the National Cheng Kung University, Taiwan, in 2000. He is currently a post doctor with research interest in design and fabrication of microcantilever-based biochemical sensor. He is also a member of the National Nano Devices Laboratory (NDL), Taiwan. P.L. Kuo received MD degree from National Taiwan University, Taiwan, and he is presently Professor and Chairman of the Department of Obstetrics and Gynecology in National Cheng Kung University, Taiwan. His research interests are genetic diagnosis and epigenetic regulation of genes during spermatogenesis and gametogenesis.
PY - 2008/3/28
Y1 - 2008/3/28
N2 - Understanding the mechanism of how biological reactions produce mechanical loadings is fundamental to biomedical developments. A CMOS biosensor chip is developed to measure in situ the induced surface stress change by DNA hybridization. For 20-mer thiol-modified single stranded DNA (ssDNA), the mechanism of ssDNA attached to gold surface via a sulfur-gold linkage can be investigated by using the Langmuir adsorption model. Experimental results indicate that the immobilization response is less than 1 s, the total number of ssDNA molecules on the cantilever is about 3 × 1011, and the induced surface stress is 0.15 N/m. The surface stress sensitivity of the sensor is about 3.5 × 10-5 m/N. The estimated adsorption rate of the ssDNA is 0.005 s-1. The biosensor is capable of discriminating complimentary molecular targets and thus may provide a powerful platform for high throughput real-time analysis of DNA.
AB - Understanding the mechanism of how biological reactions produce mechanical loadings is fundamental to biomedical developments. A CMOS biosensor chip is developed to measure in situ the induced surface stress change by DNA hybridization. For 20-mer thiol-modified single stranded DNA (ssDNA), the mechanism of ssDNA attached to gold surface via a sulfur-gold linkage can be investigated by using the Langmuir adsorption model. Experimental results indicate that the immobilization response is less than 1 s, the total number of ssDNA molecules on the cantilever is about 3 × 1011, and the induced surface stress is 0.15 N/m. The surface stress sensitivity of the sensor is about 3.5 × 10-5 m/N. The estimated adsorption rate of the ssDNA is 0.005 s-1. The biosensor is capable of discriminating complimentary molecular targets and thus may provide a powerful platform for high throughput real-time analysis of DNA.
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U2 - 10.1016/j.snb.2007.10.072
DO - 10.1016/j.snb.2007.10.072
M3 - Article
AN - SCOPUS:40949091988
VL - 130
SP - 674
EP - 681
JO - Sensors and Actuators B: Chemical
JF - Sensors and Actuators B: Chemical
SN - 0925-4005
IS - 2
ER -