Double-microcantilever design for surface stress measurement in biosensors

T. I. Yin, S. M. Yang

研究成果: Conference article同行評審

3 引文 斯高帕斯(Scopus)


Microcantilever sensor with embedded piezoresistor has been proposed to measure the surface stress change from biochemical reaction. However, the sensor performance is adversely influenced by the piezoresistive thermal stress and biaxial surface stress loading. A mechanics model of piezoresistive microcantilever subject to surface stress loading is developed in this paper. A double-microcantilever design composed of the top immobilized microcantilever and the bottom sensing microcantilever is also proposed such that the surface stress loading can be converted to a concentrated force loading. The effect of biaxial surface stress can thus be limited to the immobilized microcantilever with the uniaxial strain in the sensing microcantilever. Analyses show that the surface stress sensitivity can be increased by high length ratio and lower thickness ratio of the two cantilevers. More than two orders of magnitude in measurement sensitivity can be achieved and the induced thermal noise can be minimized.

頁(從 - 到)333-344
期刊Proceedings of SPIE - The International Society for Optical Engineering
出版狀態Published - 2005 10月 3
事件Smart Structures and Materials 2005 - Smart Electronics, MEMS,, BioMEMS, and Nanotechnology - San Diego, CA, United States
持續時間: 2005 3月 72005 3月 10

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程


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