Dual-confocal auto-focus sensing system in ultrafast laser application

Yung Hsing Wang, Pin Hao Hu, Yang Cheng Lin, Shun Sheng Ke, Yu Hsiu Chang, Chien Sheng Liu, Ji Bin Horng

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

A dual-confocal auto-focus sensing module for measuring defocusing positions of specimens in laser machining systems or inspecting devices is proposed. This sensing module can improve the detecting accuracy by analyzing and fitting signals from the difference between the dual optical paths, and miniaturize the optical apparatus with the superior integrated optical design. This auto-focusing module is especially integrated with the femtosecond laser machining system used to induce microstructures of silicon materials. The results of the simulations and the experiments demonstrate that the values of the positioning accuracy and the repeatability are both less than ±1.5μm with the measuring ranges of ±200μm.

原文English
主出版物標題IEEE Sensors 2010 Conference, SENSORS 2010
頁面486-489
頁數4
DOIs
出版狀態Published - 2010 十二月 1
事件9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
持續時間: 2010 十一月 12010 十一月 4

出版系列

名字Proceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
國家United States
城市Waikoloa, HI
期間10-11-0110-11-04

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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  • 引用此

    Wang, Y. H., Hu, P. H., Lin, Y. C., Ke, S. S., Chang, Y. H., Liu, C. S., & Horng, J. B. (2010). Dual-confocal auto-focus sensing system in ultrafast laser application. 於 IEEE Sensors 2010 Conference, SENSORS 2010 (頁 486-489). [5690156] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2010.5690156