Effect of different properties of Cu(In1-xGax)Se2 thin films synthesized by femtosecond and nanosecond pulsed laser deposition

Mu Gong Tsai, Chia Chuan Chen, You Jyun Chen, In Gann Chen, Xiaoding Qi, Jung Chun Huang, Cen Ying Lin, Chung Wei Cheng

研究成果: Conference contribution

摘要

Two kinds of pulsed laser sources, femtosecond laser (fs laser) and nanosecond laser (ns laser), were used in the pulsed laser deposition (PLD) system to synthesize copper indium gallium selenium (CIGS) thin films at the substrate temperature from room temperature (RT) and 500°C. Different surface morphology, crystallinity, and stoichiometric ratio were observed on CIGS thin films deposited by femtosecond pulsed laser deposition (fs-PLD) and nanosecond pulsed laser deposition (ns-PLD) respectively, that resulted in different optical and electrical properties. It is proposed that the laser absorption of CIGS target with different laser wavelength caused the difference in laser penetration depths into the target, so that the stoichiometric ratio of the evaporated materials splashing from the target were different between fs-PLD and ns-PLD processes.

原文English
主出版物標題Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
編輯Stephan Roth, Xianfan Xu, Yoshiki Nakata, Beat Neuenschwander
發行者SPIE
ISBN(電子)9781628414400
DOIs
出版狀態Published - 2015
事件Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - San Francisco, United States
持續時間: 2015 2月 92015 2月 12

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
9350
ISSN(列印)0277-786X
ISSN(電子)1996-756X

Other

OtherLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX
國家/地區United States
城市San Francisco
期間15-02-0915-02-12

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程

指紋

深入研究「Effect of different properties of Cu(In1-xGax)Se2 thin films synthesized by femtosecond and nanosecond pulsed laser deposition」主題。共同形成了獨特的指紋。

引用此