Effect of electric potential and mechanical force on copper electro-chemical mechanical planarization

Sheng Wen Chen, Te Ming Kung, Chuan Pu Liu, Shih Chieh Chang, Yi Lung Cheng, Ying Lang Wang

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy