The Pb(Zr0.52Tio 43)03. PZT, thin films with good ferroelectric properties and leakage behavior are obtained by metal-organic decomposition (MOD) process. Stringent control in post-annealing process is required to circumvent the deleterious effect on electrical properties induced by the loss of Pb-species. Incorporation of excess-Pb species in precursors further effectively suppresses the leakage current (JL) and increases remanent polarization (Pr), in accompany with the decrease in coercive force (Ec), for the PZT films. The best properties obtained are : Pr= 14.8 μ C/cm2 and Ec=104.2 kV/cm.
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