摘要
The Pb(Zr0.52Tio 43)03. PZT, thin films with good ferroelectric properties and leakage behavior are obtained by metal-organic decomposition (MOD) process. Stringent control in post-annealing process is required to circumvent the deleterious effect on electrical properties induced by the loss of Pb-species. Incorporation of excess-Pb species in precursors further effectively suppresses the leakage current (JL) and increases remanent polarization (Pr), in accompany with the decrease in coercive force (Ec), for the PZT films. The best properties obtained are : Pr= 14.8 μ C/cm2 and Ec=104.2 kV/cm.
原文 | English |
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頁(從 - 到) | 311-318 |
頁數 | 8 |
期刊 | Integrated Ferroelectrics |
卷 | 25 |
發行號 | 1-4 |
DOIs | |
出版狀態 | Published - 1999 |
All Science Journal Classification (ASJC) codes
- 電子、光磁材料
- 控制與系統工程
- 陶瓷和複合材料
- 凝聚態物理學
- 電氣與電子工程
- 材料化學