Effect of halogen in high-density oxygen plasmas on photoresist trimming

Chian Yuh Sin, Bing Hung Chen, W. L. Loh, J. Yu, P. Yelehanka, A. See, L. Chan

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

指紋

深入研究「Effect of halogen in high-density oxygen plasmas on photoresist trimming」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Chemical Compounds

Earth & Environmental Sciences

Medicine & Life Sciences