Effect of nitrogen flow ratios on the microstructure and properties of Ta-Al-N thin films by reactive cosputtering

C. K. Chung, T. S. Chen

研究成果: Article同行評審

7 引文 斯高帕斯(Scopus)

指紋 深入研究「Effect of nitrogen flow ratios on the microstructure and properties of Ta-Al-N thin films by reactive cosputtering」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science