TY - GEN
T1 - Effect of oxygen partial pressure on electrical characteristics of amorphous zinc-tin-oxide thin-film transistors
AU - Chang, Sheng Po
N1 - Copyright:
Copyright 2014 Elsevier B.V., All rights reserved.
PY - 2014
Y1 - 2014
N2 - We fabricated and studied the electrical characteristics of thin-film transistors with an amorphous zinc-tin-oxide (a-ZTO) channel, which was deposited by radio frequency magnetron co-sputtering under different oxygen partial pressures. The effect of varying the oxygen concentration on the electrical properties and device performance of the a-ZTO TFTs was investigated. A positive shift observed in the threshold voltage with increasing oxygen suggests that the number of oxygen vacancies in the a-ZTO film decreased. With an oxygen flow rate of 4%, a threshold voltage of 2.25 V, an on-off current ratio of 2.1 × 103, and a subthreshold slope of 0.8 V·dec-1 were obtained.
AB - We fabricated and studied the electrical characteristics of thin-film transistors with an amorphous zinc-tin-oxide (a-ZTO) channel, which was deposited by radio frequency magnetron co-sputtering under different oxygen partial pressures. The effect of varying the oxygen concentration on the electrical properties and device performance of the a-ZTO TFTs was investigated. A positive shift observed in the threshold voltage with increasing oxygen suggests that the number of oxygen vacancies in the a-ZTO film decreased. With an oxygen flow rate of 4%, a threshold voltage of 2.25 V, an on-off current ratio of 2.1 × 103, and a subthreshold slope of 0.8 V·dec-1 were obtained.
UR - http://www.scopus.com/inward/record.url?scp=84904309906&partnerID=8YFLogxK
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U2 - 10.4028/www.scientific.net/AMM.590.229
DO - 10.4028/www.scientific.net/AMM.590.229
M3 - Conference contribution
AN - SCOPUS:84904309906
SN - 9783038351511
T3 - Applied Mechanics and Materials
SP - 229
EP - 233
BT - Innovative Solutions in the Field of Engineering Sciences
PB - Trans Tech Publications Ltd
T2 - 2014 International Conference on Applied Mechanics and Mechanical Automation, AMMA 2014
Y2 - 20 May 2014 through 21 May 2014
ER -