Effect of periods on wear performance of TiN/AlN superlattice films

S. H. Yao, W. H. Kao, Y. L. Su, T. H. Liu

研究成果: Article同行評審

25 引文 斯高帕斯(Scopus)

摘要

In this study, the TiN/AlN superlattice films were prepared using a newly developed high-rate reactive sputtering set-up, which featured an unbalanced and a balanced magnetron sputtering system. The former was employed to deposit the A1N film, and the latter the TiN film. The aim of this study was to obtain, through controlling the deposition conditions, a group of TiN/AlN superlattice films with various periods, and then to investigate the influence of periods on their fundamental properties and wear behavior. The results revealed that the TiN/AlN superlattice films with periods ranging from 2.4 to 67.6 nm were obtained. At periods ≦ 3.6 nm, the films had extremely high hardness, excellent adhesion and wear performance, as compared with the traditional single-layer TiN film.

原文English
頁(從 - 到)380-385
頁數6
期刊Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing
392
發行號1-2
DOIs
出版狀態Published - 2005 2月 15

All Science Journal Classification (ASJC) codes

  • 一般材料科學
  • 凝聚態物理學
  • 材料力學
  • 機械工業

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