Effect of silver dopants on the ZnO thin films prepared by a radio frequency magnetron co-sputtering system

Fang Cheng Liu, Jyun Yong Li, Tai Hong Chen, Chun How Chang, Ching Ting Lee, Wei Hua Hsiao, Day Shan Liu

研究成果: Article

11 引文 斯高帕斯(Scopus)

摘要

Ag-ZnO co-sputtered films at various atomic ratios of Ag (Ag/(Ag + Zn) at.%) were prepared by a radio frequency magnetron cosputtering system, using the co-sputtered targets of Ag and ZnO. The activation of the Ag acceptors (AgZn) and the formation of the Ag aggregations (Ag0) in the ZnO matrix were investigated from XRD, Raman scattering, and XPS measurements. The Ag-ZnO co-sputtered film behaving like a p-type conduction was achievable after annealing at 350 ° C under air ambient for 1 h.

原文English
文章編號797
期刊Materials
10
發行號7
DOIs
出版狀態Published - 2017 七月 14

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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