Effect of substrate temperature on the electrically conductive stability of sputtered NiO films

Wei Luen Jang, Yang Ming Lu, Weng Sing Hwang, Tung Li Hsiung, H. Paul Wang

研究成果: Article同行評審

53 引文 斯高帕斯(Scopus)

摘要

Nickel oxide is a typical p-type semiconductor which has a wide range of applications due to its particular electrical, optical, and magnetic properties. However, the electrical conductivity of sputtered NiO film is unstable in the humid air and decay rapidly (electrical aging) with time. From the view point of application, trying to stabilize the electrical conductivity of NiO films is essential. In this paper, the stability of NiO films was improved by heating substrate. The result shows that the aging rate has obviously slowed down as the NiO films were deposited at the elevated temperatures of 200 °C and 300 °C. This improvement has strong relationship to the surface structure of the film. The preferred orientation of NiO film changes from (111) to (200) as the substrate temperature is increased and this change occurs progressively in NiO film from the topmost surface to the bottom material adjacent to the substrate. It is found that the electrical aging of sputtered NiO film could be depressed with forming advantageous (200) planes by elevating substrate temperature.

原文English
頁(從 - 到)5444-5447
頁數4
期刊Surface and Coatings Technology
202
發行號22-23
DOIs
出版狀態Published - 2008 8月 30

All Science Journal Classification (ASJC) codes

  • 一般化學
  • 凝聚態物理學
  • 表面和介面
  • 表面、塗料和薄膜
  • 材料化學

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