Effect of the heating rate for preheating process on the composition and phase transformation of sol-gel derived lead zirconate titanate thin film

Tien I. Chang, Jow Lay Huang, Hong Ping Lin, Sheng Chang Wang, Long Wu, Chen Fu Lin

研究成果: Conference article同行評審

3 引文 斯高帕斯(Scopus)

摘要

Lead zirconate titanate (PZT, 53/47) thin firms were successfully fabricated on multilayers substrate by the spin-coating sol-gel process. The effects of different heating rates on the composition and phase transformation of PZT films were discussed. This study focused on the slow heating rate (1°C/min) to the first preheating step (150°C) and to second pyrolysis step (350°C). By XRD method, PZT films contained entirely pure perovskite phase annealing at 700°C for 30 min for the slow heating rate procedure. By using EPMA analysis, the composition of PZT thin film derived by this procedure was indeed located at the MPB region. Furthermore, the phase coexistence was evidenced by the BEI analysis.

原文English
頁(從 - 到)55-68
頁數14
期刊Integrated Ferroelectrics
75
DOIs
出版狀態Published - 2005
事件Seventeenth International Symposium on Integrated Ferroelectrics, ISIF-17 - Shanghai, China
持續時間: 2005 4月 172005 4月 20

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 控制與系統工程
  • 陶瓷和複合材料
  • 凝聚態物理學
  • 電氣與電子工程
  • 材料化學

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