Effect of V/III ratios on surface morphology in a GaSb thin film grown on GaAs substrate by MOCVD

Chih Jen Hsiao, Chun Kuan Liu, Sa Hoang Huynh, Thien Huu Ha Minh, Hung Wei Yu, Hong Quan Nguyen, Jer Shen Maa, Shoou Jinn Chang, Edward Yi Chang

研究成果: Conference contribution

摘要

The epitaxial growth of GaSb thin film with different V/III ratios on high-lattice-mismatched GaAs (001) substrates by metal organic chemical vapor deposition (MOCVD) was investigated. Under optimal V/III ratio of 2.5, we found that there are many periodic 90° interfacial misfit dislocation (IMF) arrays existing at the GaAs/GaSb interface. The surface roughness is about 3.6nm, 2.2nm, 3.8nm, respectively while different V/III ratios (1.25, 2.5, 5) were adopted. These results demonstrated that the hill-and valley structure on the surface of GaSb/GaAs heterostructure can be effectively improved, and formed smooth surface morphology.

原文English
主出版物標題IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
發行者Institute of Electrical and Electronics Engineers Inc.
頁面456-458
頁數3
ISBN(電子)9781479957606
DOIs
出版狀態Published - 2014 10月 10
事件11th IEEE International Conference on Semiconductor Electronics, ICSE 2014 - Kuala Lumpur, Malaysia
持續時間: 2014 8月 272014 8月 29

出版系列

名字IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

Other

Other11th IEEE International Conference on Semiconductor Electronics, ICSE 2014
國家/地區Malaysia
城市Kuala Lumpur
期間14-08-2714-08-29

All Science Journal Classification (ASJC) codes

  • 電氣與電子工程
  • 電子、光磁材料

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