摘要
ZnO:Ga (GZO) transparent conducting oxide (TCO) films are deposited on flexible polyethersulfone (PES) substrates using the radio frequency sputtering technique. The bending durability of flexible TCOs is improved by inserting 100-nm-thick ZnO buffer layers. The strain of the samples with and without buffer layers arising from bending is studied using X-ray diffraction. After the insertion of 100-nm-thick ZnO buffer layers, the strain of GZO films without ZnO after outward and inward bending for 2000 cycles decreases from $2.063× 10-3 and 2.203× 10-3 to 1.74× 10-3 and 1.966× 10-3, respectively. Such strain variation is caused by the difference in adhesive force at the surface of 100-nm-thick ZnO/PES and PES. The surface energy of PES and 100-nm-thick ZnO/PES bent outwards and inwards for 2000 cycles increased from 34.38 and 30.56 to 36.45 and 36.03 mJ m2, respectively.
原文 | English |
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文章編號 | 6527295 |
頁(從 - 到) | 2324-2330 |
頁數 | 7 |
期刊 | IEEE Transactions on Electron Devices |
卷 | 60 |
發行號 | 7 |
DOIs | |
出版狀態 | Published - 2013 |
All Science Journal Classification (ASJC) codes
- 電子、光磁材料
- 電氣與電子工程