TY - JOUR
T1 - Effects of Acetylene Flow Rate on Structure, Mechanical Properties, and Tribological Properties of Cr-CHx Coatings Deposited by Radio Frequency Magnetron Sputtering
AU - Su, Y. L.
AU - Kao, W. H.
AU - Chen, G. Y.
N1 - Funding Information:
The authors gratefully acknowledge the financial support provided to this study by the Ministry of Science and Technology of Taiwan under Contract No. MOST 108-2221-E-006-182.
Publisher Copyright:
© 2021, ASM International.
PY - 2021/12
Y1 - 2021/12
N2 - Cr-CHx coatings (where x indicates the acetylene flow rate and has a value in the range of 5 to 35 sccm) were deposited on high-speed steel substrates using a radio frequency magnetron sputtering system. The crystalline phases of the deposited coatings were characterized using x-ray diffraction. The surface morphologies and cross-sectional microstructures were analyzed using scanning electron microscopy. The XRD results showed that the coatings consisted mainly of Cr7C3 and metal Cr crystalline phases. In addition, the Raman spectra analysis results showed that the Cr-CH25 and Cr-CH35 coatings had ID–IG ratios of 1.08 and 1.22, respectively. The coating hardness gradually decreased with an increasing acetylene flow rate. By contrast, the adhesion strength increased as the flow rate increased beyond 15 sccm. Among all the coatings, the Cr-CH35 coating showed the best tribological properties, with an average friction coefficient of 0.048 and wear rate of 0.28×10−6 mm3/Nm under a load of 8 N.
AB - Cr-CHx coatings (where x indicates the acetylene flow rate and has a value in the range of 5 to 35 sccm) were deposited on high-speed steel substrates using a radio frequency magnetron sputtering system. The crystalline phases of the deposited coatings were characterized using x-ray diffraction. The surface morphologies and cross-sectional microstructures were analyzed using scanning electron microscopy. The XRD results showed that the coatings consisted mainly of Cr7C3 and metal Cr crystalline phases. In addition, the Raman spectra analysis results showed that the Cr-CH25 and Cr-CH35 coatings had ID–IG ratios of 1.08 and 1.22, respectively. The coating hardness gradually decreased with an increasing acetylene flow rate. By contrast, the adhesion strength increased as the flow rate increased beyond 15 sccm. Among all the coatings, the Cr-CH35 coating showed the best tribological properties, with an average friction coefficient of 0.048 and wear rate of 0.28×10−6 mm3/Nm under a load of 8 N.
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U2 - 10.1007/s11665-021-06087-3
DO - 10.1007/s11665-021-06087-3
M3 - Article
AN - SCOPUS:85111869984
SN - 1059-9495
VL - 30
SP - 9084
EP - 9093
JO - Journal of Materials Engineering and Performance
JF - Journal of Materials Engineering and Performance
IS - 12
ER -