TY - GEN
T1 - Effects of deposition inclination angle on the mechanical, optical and electrical characteristics of Al-doped ZnO films
AU - Li, Tse Chang
AU - Lin, Jen Fin
N1 - Publisher Copyright:
© 2015 JSAP.
PY - 2015/7/30
Y1 - 2015/7/30
N2 - A flat plate in the deposition stage is designed to be tilted flexibly to form an inclination angle between an ion beam and the direction normal to a polyethylene terephthalate (PET) substrate. Five kinds of PET/aluminum-doped zinc oxide specimen were prepared to examine the effects of inclination angle on the mechanical, optical and electrical properties. Increase in the inclination angle is advantageous for the increase in thin film porosity before reaching its asymptotic value. An appropriate choice in a nonzero inclination angle can increase the mechanical properties in hardness and reduced module and carrier concentration, and decrease the carrier mobility and electrical resistivity of the specimen greatly in a simple way.
AB - A flat plate in the deposition stage is designed to be tilted flexibly to form an inclination angle between an ion beam and the direction normal to a polyethylene terephthalate (PET) substrate. Five kinds of PET/aluminum-doped zinc oxide specimen were prepared to examine the effects of inclination angle on the mechanical, optical and electrical properties. Increase in the inclination angle is advantageous for the increase in thin film porosity before reaching its asymptotic value. An appropriate choice in a nonzero inclination angle can increase the mechanical properties in hardness and reduced module and carrier concentration, and decrease the carrier mobility and electrical resistivity of the specimen greatly in a simple way.
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U2 - 10.1109/AM-FPD.2015.7173228
DO - 10.1109/AM-FPD.2015.7173228
M3 - Conference contribution
AN - SCOPUS:84947903122
T3 - Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials
SP - 151
EP - 154
BT - Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices, AM-FPD 2015
Y2 - 1 July 2015 through 4 July 2015
ER -