Effects of deposition inclination angle on the mechanical, optical and electrical characteristics of Al-doped ZnO films

Tse Chang Li; Jen-Fin Lin

doi:10.1109/AM-FPD.2015.7173228

Effects of deposition inclination angle on the mechanical, optical and electrical characteristics of Al-doped ZnO films

Tse Chang Li, Jen-Fin Lin

機械工程學系

研究成果: Conference contribution

摘要

A flat plate in the deposition stage is designed to be tilted flexibly to form an inclination angle between an ion beam and the direction normal to a polyethylene terephthalate (PET) substrate. Five kinds of PET/aluminum-doped zinc oxide specimen were prepared to examine the effects of inclination angle on the mechanical, optical and electrical properties. Increase in the inclination angle is advantageous for the increase in thin film porosity before reaching its asymptotic value. An appropriate choice in a nonzero inclination angle can increase the mechanical properties in hardness and reduced module and carrier concentration, and decrease the carrier mobility and electrical resistivity of the specimen greatly in a simple way.

原文	English
主出版物標題	Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices
主出版物子標題	TFT Technologies and FPD Materials
發行者	Institute of Electrical and Electronics Engineers Inc.
頁面	151-154
頁數	4
ISBN（電子）	9784863484771
DOIs	https://doi.org/10.1109/AM-FPD.2015.7173228
出版狀態	Published - 2015 七月 30
事件	22nd International Workshop on Active-Matrix Flatpanel Displays and Devices, AM-FPD 2015 - Kyoto, Japan 持續時間: 2015 七月 1 → 2015 七月 4

出版系列

名字	Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials

Other

Other	22nd International Workshop on Active-Matrix Flatpanel Displays and Devices, AM-FPD 2015
國家	Japan
城市	Kyoto
期間	15-07-01 → 15-07-04

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

存取文件

10.1109/AM-FPD.2015.7173228

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引用此

Li, T. C., & Lin, J-F. (2015). Effects of deposition inclination angle on the mechanical, optical and electrical characteristics of Al-doped ZnO films. 於 Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials (頁 151-154). [7173228] (Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/AM-FPD.2015.7173228

Li, Tse Chang ; Lin, Jen-Fin. / Effects of deposition inclination angle on the mechanical, optical and electrical characteristics of Al-doped ZnO films. Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials. Institute of Electrical and Electronics Engineers Inc., 2015. 頁 151-154 (Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials).

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title = "Effects of deposition inclination angle on the mechanical, optical and electrical characteristics of Al-doped ZnO films",

abstract = "A flat plate in the deposition stage is designed to be tilted flexibly to form an inclination angle between an ion beam and the direction normal to a polyethylene terephthalate (PET) substrate. Five kinds of PET/aluminum-doped zinc oxide specimen were prepared to examine the effects of inclination angle on the mechanical, optical and electrical properties. Increase in the inclination angle is advantageous for the increase in thin film porosity before reaching its asymptotic value. An appropriate choice in a nonzero inclination angle can increase the mechanical properties in hardness and reduced module and carrier concentration, and decrease the carrier mobility and electrical resistivity of the specimen greatly in a simple way.",

author = "Li, {Tse Chang} and Jen-Fin Lin",

year = "2015",

month = jul,

day = "30",

doi = "10.1109/AM-FPD.2015.7173228",

language = "English",

series = "Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials",

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booktitle = "Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices",

address = "United States",

note = "22nd International Workshop on Active-Matrix Flatpanel Displays and Devices, AM-FPD 2015 ; Conference date: 01-07-2015 Through 04-07-2015",

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Li, TC & Lin, J-F 2015, Effects of deposition inclination angle on the mechanical, optical and electrical characteristics of Al-doped ZnO films. 於 Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials., 7173228, Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Institute of Electrical and Electronics Engineers Inc., 頁 151-154, 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices, AM-FPD 2015, Kyoto, Japan, 15-07-01. https://doi.org/10.1109/AM-FPD.2015.7173228

Effects of deposition inclination angle on the mechanical, optical and electrical characteristics of Al-doped ZnO films. / Li, Tse Chang; Lin, Jen-Fin.

Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials. Institute of Electrical and Electronics Engineers Inc., 2015. p. 151-154 7173228 (Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials).

研究成果: Conference contribution

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N2 - A flat plate in the deposition stage is designed to be tilted flexibly to form an inclination angle between an ion beam and the direction normal to a polyethylene terephthalate (PET) substrate. Five kinds of PET/aluminum-doped zinc oxide specimen were prepared to examine the effects of inclination angle on the mechanical, optical and electrical properties. Increase in the inclination angle is advantageous for the increase in thin film porosity before reaching its asymptotic value. An appropriate choice in a nonzero inclination angle can increase the mechanical properties in hardness and reduced module and carrier concentration, and decrease the carrier mobility and electrical resistivity of the specimen greatly in a simple way.

AB - A flat plate in the deposition stage is designed to be tilted flexibly to form an inclination angle between an ion beam and the direction normal to a polyethylene terephthalate (PET) substrate. Five kinds of PET/aluminum-doped zinc oxide specimen were prepared to examine the effects of inclination angle on the mechanical, optical and electrical properties. Increase in the inclination angle is advantageous for the increase in thin film porosity before reaching its asymptotic value. An appropriate choice in a nonzero inclination angle can increase the mechanical properties in hardness and reduced module and carrier concentration, and decrease the carrier mobility and electrical resistivity of the specimen greatly in a simple way.

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Li TC, Lin J-F. Effects of deposition inclination angle on the mechanical, optical and electrical characteristics of Al-doped ZnO films. 於 Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials. Institute of Electrical and Electronics Engineers Inc. 2015. p. 151-154. 7173228. (Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials). https://doi.org/10.1109/AM-FPD.2015.7173228