Effects of deposition inclination angle on the mechanical, optical and electrical characteristics of Al-doped ZnO films

Tse Chang Li, Jen-Fin Lin

研究成果: Conference contribution

摘要

A flat plate in the deposition stage is designed to be tilted flexibly to form an inclination angle between an ion beam and the direction normal to a polyethylene terephthalate (PET) substrate. Five kinds of PET/aluminum-doped zinc oxide specimen were prepared to examine the effects of inclination angle on the mechanical, optical and electrical properties. Increase in the inclination angle is advantageous for the increase in thin film porosity before reaching its asymptotic value. An appropriate choice in a nonzero inclination angle can increase the mechanical properties in hardness and reduced module and carrier concentration, and decrease the carrier mobility and electrical resistivity of the specimen greatly in a simple way.

原文English
主出版物標題Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices
主出版物子標題TFT Technologies and FPD Materials
發行者Institute of Electrical and Electronics Engineers Inc.
頁面151-154
頁數4
ISBN(電子)9784863484771
DOIs
出版狀態Published - 2015 七月 30
事件22nd International Workshop on Active-Matrix Flatpanel Displays and Devices, AM-FPD 2015 - Kyoto, Japan
持續時間: 2015 七月 12015 七月 4

出版系列

名字Proceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials

Other

Other22nd International Workshop on Active-Matrix Flatpanel Displays and Devices, AM-FPD 2015
國家Japan
城市Kyoto
期間15-07-0115-07-04

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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