Effects of gas residence time on microwave plasma enhanced CVD of ultrananocrystalline diamond in mixtures of methane and argon without hydrogen or oxygen additives

Ji Heng Jiang, Yueh Chieh Chu, Wei Cheng Fang, Shih Tse Chen, Yonhua Tzeng

研究成果: Article同行評審

4 引文 斯高帕斯(Scopus)

指紋 深入研究「Effects of gas residence time on microwave plasma enhanced CVD of ultrananocrystalline diamond in mixtures of methane and argon without hydrogen or oxygen additives」主題。共同形成了獨特的指紋。

Chemical Compounds

Engineering & Materials Science