Effects of interfacial layers on thermal chemical vapour deposition of carbon nanotubes using iron catalyst

Chao Liu, An Jen Cheng, Maurice Clark, Yonhua Tzeng

研究成果: Article同行評審

14 引文 斯高帕斯(Scopus)

摘要

Growing vertically aligned carbon nanotubes on a smooth substrate surface requires the formation of high-density catalyst nanoparticles. This, in turn, requires the minimum diffusion of catalyst into the substrate at the growth temperature for carbon nanotubes. In this work, interfacial layers have been optimized and examined for growing vertically aligned carbon nanotubes on various smooth and nonporous substrates. With an optimized interfacial multilayer, carbon nanotubes with excellent adhesion to the substrate have also been achieved. This process can be applied to grow carbon nanotubes on almost any substrate that is compatible with the thermal CVD environments.

原文English
頁(從 - 到)835-840
頁數6
期刊Diamond and Related Materials
14
發行號3-7
DOIs
出版狀態Published - 2005 3月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 化學 (全部)
  • 機械工業
  • 材料化學
  • 電氣與電子工程

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