Nanoindentation tests are performed on as-deposited Au/Cr/Si thin films to a depth of 1000 nm, respectively. The indentations in as-deposited and annealed specimens are examined using transmission electron microscopy (TEM). In the case of the as-deposited specimens, a pop-out feature is observed in the unloading curves and the indentation pressure induces a chain-like island structure and a distorted crystalline structure within the indentation zone. However, in the specimens annealed at temperatures of 250°C and 350°C, respectively, the microstructure of the indentation zone changes from a distorted crystalline structure to an amorphous phase. At an annealing temperature of 450°C, the microstructure contains both amorphous phase and crystalline eutectic phase. The formation of eutectic phase is the result of a higher annealing temperature and a greater indentation deformation.
|頁（從 - 到）||281-287|
|期刊||Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao|
|出版狀態||Published - 2008 八月|
All Science Journal Classification (ASJC) codes